Vacuum Technology, Thin Films, and Sputtering. An Introduction

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Vacuum technology is advancing and expanding so rapidly that a major difficulty for most companies in the field is finding qualified technicians needed for expansion and as replacements. The only recourse for most companies is to hire capable, though untrained, people to train them in-house. One of the problems in this course of action is that it repeatedly draws on the valuable time of experienced personnel to Read more...

Author(s): R. V. Stuart (Auth.)
Publisher: Elsevier Science
Year: 1983

Language: English
Pages: 152
City: Oxford
Tags: Приборостроение;Вакуумная техника;

Content:
Front Matter, Page iii
Copyright, Page iv
PREFACE, Pages vii-viii
CHAPTER I - EVAPORATION, Pages 1-22
CHAPTER II - VACUUM TECHNOLOGY, Pages 23-63
CHAPTER III - VACUUM EVAPORATION, Pages 65-89
CHAPTER IV - SPUTTERING, Pages 91-135
CHAPTER V - THIN FILMS, Pages 137-148
INDEX, Pages 149-151