product iamge

The Surface Properties of Oxidized Silicon

This document was uploaded by one of our users. The uploader already confirmed that they had the permission to publish it. If you are author/publisher or own the copyright of this documents, please report to us by using this DMCA report form.

Download
Search on Amazon

Simply click on the Download Book button.

Yes, Book downloads on Ebookily are 100% Free.

Sometimes the book is free on Amazon As well, so go ahead and hit "Search on Amazon"

Author(s): E. Kooi (auth.)
Edition: 1
Publisher: Springer-Verlag Berlin Heidelberg
Year: 1967

Language: English
Pages: 134
Tags: Inorganic Chemistry

Front Matter....Pages i-x
Introduction....Pages 1-2
General Review of the Effect of Silicon-Dioxide Coatings on the Surface Properties of Silicon and the Importance of these Coatings in Semiconductor-Device Technology....Pages 3-51
Diffusion of Phosphorus into Silicon and the Masking Action of Silicon-Dioxide Films....Pages 52-63
Effects of Low-Temperature Heat Treatments on the Surface Properties of Oxidized Silicon....Pages 64-80
Influence of X-Ray Irradiations on the Charge Distributions in Metal-Oxide-Silicon Structures....Pages 81-89
Effects of Ionizing Irradiations on the Properties of Oxide-Covered Silicon Surfaces....Pages 90-113
The Surface Charge in Oxidized Silicon....Pages 114-132
Back Matter....Pages 133-134