While electronic and optical processes of semiconductors are thoroughly studied, it is the mechanical properties that often dictate fundamental limits on the fabrication and packaging of semiconductor devices. This volume, part of the ''Semiconductors and Semimetals'' series, written by an international group of experts, addresses all aspects of mechanical behaviour of semiconductor materials - elasticity, plasticity, and fracture - to better define processing limitation, design issues, and device reliability. Topics discussed include fracture and deformation properties of semi-conductors and their relation to crystal growth, thermal processing, and alloy design; micromechanics of thin films and strained layer superlattices; elastic properties of semiconductors and semiconductor alloys; and silicon microdevides. The book is aimed at electrical engineers, materials scientists, condensed matter physicists, and researchers and technicians in the semiconductor industry.
Author(s): Katherine T. Faber and Kevin J. Malloy (Eds.)
Series: Semiconductors and Semimetals 37
Publisher: Academic Press
Year: 1992
Language: English
Pages: ii-x, 1-375
Content:
Semiconductors and Semimetals
Page ii
Edited by
Page iii
Copyright page
Page iv
List of Contributors
Page viii
Preface
Pages ix-x
Katherine T. Faber, Kevin J. Malloy
Chapter 1 Elastic Constants and Related Properties of Semiconductor Compounds and their Alloys Original Research Article
Pages 1-77
A.-B. Chen, Arden Sher, W.T. Yost
Chapter 2 Fracture of Silicon and Other Semiconductors Original Research Article
Pages 79-142
David R. Clarke
Chapter 3 The Plasticity of Elemental and Compound Semiconductors Original Research Article
Pages 143-187
Hans Siethojf
Chapter 4 Mechanical Behavior of Compound Semiconductors Original Research Article
Pages 189-230
Sivaraman Guruswamy, Katherine T. Faber, John P. Hirth
Chapter 5 Deformation Behavior of Compound Semiconductors Original Research Article
Pages 231-266
S. Mahajan
Chapter 6 Injection of Dislocations into Strained Multilayer Structures Original Research Article
Pages 267-292
John P. Hirth
Chapter 7 Critical Technologies for the Micromachining of Silicon Original Research Article
Pages 293-337
Don L. Kendall, Charles B. Fleddermann, Kevin J. Malloy
Chapter 8 Processing and Semiconductor Thermoelastic Behavior Original Research Article
Pages 339-367
Ikuo Matsuba, Kinji Mokuya
Index
Pages 369-375
