SRIM-The Stopping and Range of Ions in Matter

This book covers the physical phenomena associated with the penetration of energetic ions into matter. It is primarily concerned with the quantitative evaluation of how ions lose energy into matter and the final distribution of these ions after they stop within the target. Also considered are the first order effects of the atoms on solids, particularly the electronic excitation of the atoms, the displacement of lattice atoms by energetic collisions (lattice damage) and the production of plasmons and phonons within the solid by the passing ions. No evaluation is made of thermal effects in the solid, especially redistribution of lattice atoms or implanted ions by thermal or vacancy induced diffusions. The scientific literature contains a large amount of experimentally determined stopping powers and ion range distributions. These are not, however, so accurate or dense that direct interpolation to other systems is usually possible. The main goal of this work is to establish methods for determining the stopping and range of ions based on accurate experimental data and extending these values using unified theoretical concepts.