Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS......Page 4
Contents......Page 8
Preface......Page 12
Introduction......Page 14
1.1 Introduction to Scaling Issues......Page 18
1.2.1 Scaling effects on a cantilever beam......Page 21
1.2.2 Scaling of electrostatic actuators......Page 25
1.2.3 Scaling of thermal actuators......Page 28
1.3 Motivation, Fabrication and Scaling of MEMS......Page 31
1.4 Scaling as a Methodological Approach......Page 33
References......Page 34
2.1 Electrostatic Actuators......Page 36
2.1.1 Transverse combs modelling......Page 37
2.1.2 Lateral combs modelling......Page 39
2.2 Magnetic Transducers......Page 40
2.2.1 Magnetic actuators......Page 42
2.2.2 Ferromagnetic transducers......Page 48
2.3 Thermal Actuators......Page 53
2.3.1 Thermomechanical actuators......Page 57
References......Page 67
3.1 Thermoelectric Sensors......Page 70
3.2 Application: Dew-Point Relative Humidity Sensors......Page 78
3.2.1 Device structures and operating principles......Page 79
3.2.2 Device modelling and simulations......Page 81
3.2.3 Device design......Page 84
Acknowledgements......Page 88
References......Page 89
4 Inductive Sensors for Magnetic Fields......Page 90
4.1.1 Integrated inductive sensors......Page 94
4.1.2 Planar differential transformer......Page 96
4.1.3 Signal-conditioning circuits......Page 101
4.1.4 Simulation of the planar differential transformer......Page 102
4.1.5 Experimental results......Page 104
4.2 Magnetic Immunoassay Systems......Page 114
References......Page 117
5.1 Introduction......Page 120
5.2.1 Fabrication processes......Page 122
5.2.2 Devices modelling......Page 124
5.2.3 Accelerometers......Page 126
5.2.4 Resonant mass sensors......Page 127
5.3.1 CMOS devices......Page 129
5.3.2 SOI devices......Page 133
5.3.3 Finite element modelling......Page 137
5.4 Scaling Issues on Microaccelerometers and Mass Sensors......Page 140
5.5 Some Experimental Results......Page 144
5.6 Vibrating Microgyroscopes......Page 147
5.6.1 Coupled vibratory gyroscopes......Page 151
References......Page 162
6.1 Introduction......Page 166
6.2 Energy Supply Strategies for Autonomous Microsystems......Page 168
6.2.1 Use of microlenses in photothermomechanical actuation......Page 169
6.2.2 Technologies, materials and design of photothermomechanical actuators......Page 174
6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems......Page 177
6.3.1 Photothermoelectric power generation......Page 178
6.4 Efficiency of the Combined Energy Supply Strategy......Page 183
References......Page 184
7.1 Design Issues in Microrobots......Page 186
7.2 A Microrobot Architecture Based on Photothermal Strategy......Page 188
7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems......Page 190
References......Page 195
8.1 Semiconductor-Based Nano-Electromechanical Systems......Page 196
8.2 Nanofabrication Facilities......Page 197
8.3 Overview of Nanosensors......Page 198
8.3.2 Scanning thermal microscopy (SThM)......Page 199
8.3.4 Mechanical resonant immunospecific biological detector......Page 200
8.3.6 Nanomagnetic sensors......Page 201
8.3.8 Nanometre-scale mechanical resonators......Page 202
8.3.9 Electric charge mechanical nanosensor......Page 203
References......Page 204
9.1 Introduction......Page 206
9.2 Examples of Scaling Cantilever Beam Devices......Page 208
9.3.1 Introduction......Page 215
9.3.2 Descriptions of the microstructures and analytical methods......Page 217
9.4 Conclusions......Page 236
References......Page 237
10 Concluding Remarks......Page 238
Index......Page 240