Optical Measurement of Surface Topography

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The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manu­facturing methods requires measurement strategies. There is now a large range of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. The book starts with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of modern optical instrument is described (in a common format) by an expert in the field. The book is intended for both industrial and academic scientists and engineers, and will be useful for undergraduate and postgraduate studies.

Author(s): Richard Leach (auth.), Richard Leach (eds.)
Edition: 1
Publisher: Springer-Verlag Berlin Heidelberg
Year: 2011

Language: English
Pages: 323
Tags: Characterization and Evaluation of Materials;Microwaves, RF and Optical Engineering;Measurement Science and Instrumentation;Surfaces and Interfaces, Thin Films

Front Matter....Pages -
Introduction to Surface Texture Measurement....Pages 1-14
Some Common Terms and Definitions....Pages 15-22
Limitations of Optical 3D Sensors....Pages 23-48
Calibration of Optical Surface Topography Measuring Instruments....Pages 49-70
Chromatic Confocal Microscopy....Pages 71-106
Point Autofocus Instruments....Pages 107-129
Focus Variation Instruments....Pages 131-166
Phase Shifting Interferometry....Pages 167-186
Coherence Scanning Interferometry....Pages 187-208
Digital Holographic Microscopy....Pages 209-235
Imaging Confocal Microscopy....Pages 237-286
Light Scattering Methods....Pages 287-318
Back Matter....Pages -