Novel Optical Technologies for Nanofabrication

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Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons.

This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques.

Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China.

Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China

Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Author(s): Qian Liu, Xuanming Duan, Changsi Peng (auth.)
Series: Nanostructure Science and Technology
Edition: 1
Publisher: Springer-Verlag Berlin Heidelberg
Year: 2014

Language: English
Pages: 267
Tags: Nanotechnology;Nanotechnology and Microengineering;Laser Technology, Photonics;Optical and Electronic Materials;Nanoscale Science and Technology;Optics, Optoelectronics, Plasmonics and Optical Devices

Front Matter....Pages i-ix
Introduction....Pages 1-4
Super-Resolution Laser Direct Writing and Its Applications....Pages 5-41
Laser Path-Guided Wrinkle Structures....Pages 43-80
Laser Micro-/Nanofabrication and Applications Based on Multiphoton Process....Pages 81-151
Laser Interference Nanofabrication....Pages 153-178
Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons....Pages 179-221
Mass Production of Large-Format Micro-/Nanostructure-Based Optical Devices....Pages 223-267