Nonthermal plasma chemistry and physics

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Author(s): Jürgen Meichsner
Publisher: CRC Press
Year: 2013

Language: English
Pages: 548
City: Boca Raton, Fla
Tags: Физика;Физика плазмы;


Content: Introduction Nonthermal Plasma Chemical Processes of General Interest Physics of Nonthermal Plasmas Nonthermal Plasma Chemical Reactors Elementary Processes on Surfaces in Plasma-Wall Interaction Plasma Diagnostics Surface and Thin Film Analysis Selected Applications Modeling and Simulation Trends and New Concepts