Nanotechnology: an introduction to nanostructuring techniques

Contents......Page 5
1.1.1 From Micro- to Nanotechniques......Page 11
1.1.2 Definition of Nanostructures......Page 12
1.1.3 Insight into the Nanoworld......Page 13
1.2 Building Blocks of Nanotechnology......Page 14
1.3 lnteractions and Topology......Page 17
1.4 The Microscopic Environment of the Nanoworld......Page 19
2.1.1 Chemical Bonds in Nanotechnology......Page 23
2.1.3 Dipole-Dipole Interactions......Page 24
2.1.5 Metal Bonds......Page 26
2.1.6 Covalent Bonds......Page 27
2.1.7 Coordinative Bonds......Page 29
2.1.9 Polyvalent Bonds......Page 30
2.2.1 Binding Topologies......Page 33
2.2.2 Building Blocks of Covalent Architecture......Page 34
2.2.4 Building Blocks for Weakly Bound Aggregates......Page 37
2.2.5 Assembly of Complex Structures through the Internal Hierarchy of Binding Strengths......Page 38
2.2.6 Reaction Probability and Reaction Equilibrium......Page 39
3.1 Planar Technology......Page 43
3.2.1 Condition and Preprocessing of the Substrate Surface......Page 47
3.2.2 Layer Deposition from the Cas Phase......Page 49
3.2.3 Evaporation......Page 52
3.2.4 Sputtering......Page 53
3.2.5 Chemical Vapor Deposition......Page 56
3.2.6 Galvanic Deposition......Page 58
3.2.7 Deposition by Spinning (Spin Coating)......Page 60
3.3.1 Ultrathin Layers by Vacuum Deposition Processes......Page 64
3.3.2 Deposition of Ultrathin Films from the Liquid Phase......Page 65
3.3.3 In Situ Generation of Ultrathin Inorganic Films by Chemical Surface Modification......Page 66
3.3.4 In Situ Formation of Ultrathin Inorganic Layers on Heteroorganic Materials......Page 67
3.3.5 Immobilization of Nanoparticles......Page 68
3.4.1 Adhesive Mask Technique......Page 69
3.4.2 Role of Resist in Photolithography......Page 73
3.4.3 Serial Pattern Transfer......Page 74
3.4.4 Group Transfer Processes......Page 77
3.4.6 Soft Lithography......Page 78
3.5.1 Etching Rate and Selectivity......Page 80
3.5.2 Isotropic and Anisotropic Etching Processes......Page 81
3.5.3 Lithographic Resolution in Etching Processes......Page 82
3.5.4 Wet Etching Processes......Page 83
3.5.5 Dry Etching Processes......Page 86
3.5.6 High-resolution Dry Etching Techniques......Page 88
3.6 Packaging......Page 90
3.7 Biogenic and Bioanalogue Molecules in Technical Microstructures......Page 94
4.1.1 Subtractive and Additive Creation of Nanostructures......Page 97
4.1.2 Nanostructure Generation by Lift-off Processes......Page 99
4.1.3 Principles of Nanotechnical Shape-definition and Construction......Page 101
4.2.1 Scaling Down of Mechanical Processing Techniques......Page 106
4.2.3 Surface Transport Methods......Page 107
4.2.4 Reshaping Processes......Page 108
4.2.5 Printing Processes......Page 111
4.3.1 Structure Transfer by Electromagnetic Radiation......Page 114
4.3.2 Nanolithographic Transfer of Groups of Elements by Optical Projection......Page 115
4.3.3 EUV and X-ray Lithography......Page 116
4.3.4 Multilayer Resists Techniques with Optical Pattern Transfer......Page 117
4.3.5 Near-field Optical Structure Techniques with Contact Masks......Page 119
4.3.6 Energetic Particles in Nanolithographic Structure Transfer......Page 120
4.3.7 Electron Beam Lithography......Page 121
4.3.8 Ion Beam Lithography......Page 128
4.3.10 Molecular and Nanoparticle Beam Lithography......Page 130
4.3.1 1 Direct Writing of Structures by a Particle Beam......Page 131
4.3.12 Single-particle Beam Processes......Page 134
4.3.13 Nanofabrication by Self-structuring Masks......Page 135
4.4.1 Scanning Force Probes......Page 136
4.4.2 Particle Manipulation With a Scanning Tunneling Microscope (STM)......Page 138
4.4.4 Electrically Induced Structure Generation by Scanning Probe Techniques......Page 139
4.4.5 Chemical Electroless Induced Scanning Probe Structure Generation......Page 145
4.4.6 Nanostructure Generation by Optical Near-field Probes......Page 146
5.1.2 Inorganic Dielectrics......Page 149
5.1.3 Metals......Page 150
5.1.4 Semiconductors......Page 152
5.1.5 Carbon......Page 153
5.2.1 Solids Composed of Smaller Molecules......Page 154
5.2.2 Organic Monolayer and Multilayer Stacks......Page 155
5.2.3 Synthetic Organic Polymers......Page 156
5.2.4 Biopolymers......Page 158
5.3.1 Langmuir-Blodgett Films......Page 159
5.3.2 Self-assembled Surface Films......Page 160
5.3.3 Binding of Molecules on Solid Substrate Surfaces......Page 162
5.3.4 Secondary Coupling of Molecular Monolayers......Page 164
5.3.5 Categories of Molecular Layers......Page 165
5.3.6 Molecular Coupling Components (Linkers) and Distance Components (Spacers)......Page 167
5 3.7 Definition of Binding Spots on Solid Substrates......Page 169
5.4.1 Single Molecules as Nanostructures......Page 171
5.4.2 Strategies of Molecular Construction......Page 175
5.4.3 Biogenic and Bio-analogous Nanoarchitectures......Page 178
5.4.4 DNA Nanoarchitectures......Page 181
5.4.5 Synthetic Supramolecules......Page 185
5.4.6 Nanoparticles and Nanocompartments......Page 193
5.5 Combination of Molecular Architectures and Nanoparticles With Planar Technical Structures......Page 195
6.1.1 Layer Thickness and Vertical Structure Dimensions......Page 203
6.1.2 Lateral Dimensions......Page 207
6.1.3 Structures that Assist Measurement......Page 208
6.2.1 Atomic Composition......Page 209
6.2.2 Characterization of the Chemical Suhce......Page 213
6.3 Functional Characterization of Nanostructures......Page 215
7.1 Design of Nanotransducers......Page 217
7.2.1 Nanomechanical Sensors......Page 219
7.2.2 Nanometer-precision Position Measurements with Conventional Techniques......Page 220
7.2.3 Electrically Controlled Nanoactuators......Page 221
7.2.4 Chemically Driven Nanoactuators......Page 223
7.3.1 Electrical Contacts and Nanowires......Page 226
7.3.2 Nanostructured Tunneling Barriers......Page 231
7.3.3 Quantum Dots and Localization of Elementary Particles......Page 233
7.3.4 Nanodiodes......Page 234
7.3.5 Electron Islands and Nanotransistors......Page 235
7.3.6 Nanoswitches, Molecular Switches and Logic Elements......Page 241
7.4.1 Nanostructures as Optical Sensors......Page 242
7.4.2 Nanostructured Optical Actuators......Page 243
7.5 Magnetic Nanotransducers......Page 245
7.6 Chemical Nanoscale Sensors and Actuators......Page 247
8.1 What are Nanosystems?......Page 253
8.2 Systems with Nanocomponents......Page 254
8.3 Entire Systems with Nanometer Dimensions......Page 255
References......Page 265