This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Author(s): Changhai Ru, Xinyu Liu, Yu Sun (eds.)
Edition: 1
Publisher: Springer International Publishing
Year: 2016
Language: English
Pages: VI, 409
Tags: Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Control, Robotics, Mechatronics; Engineering Design
Front Matter....Pages i-vi
A Review of Stick–Slip Nanopositioning Actuators....Pages 1-32
Piezoelectric Motor Technology: A Review....Pages 33-59
Mechanical Design of High-Speed Nanopositioning Systems....Pages 61-121
Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism....Pages 123-150
Electro-Magnetic Nano-Positioning....Pages 151-181
Modeling of Piezoelectric-Actuated Nanopositioning Stages Involving with the Hysteresis....Pages 183-212
Tracking Control for Nanopositioning Systems....Pages 213-244
Position Sensors for Nanopositioning....Pages 245-294
MEMS Nanopositioners....Pages 295-324
Control Issues of MEMS Nanopositioning Devices....Pages 325-346
A Review of Nanomanipulation in Scanning Electron Microscopes....Pages 347-379
Nanopositioning for Lithography and Data Storage....Pages 381-409
