Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Author(s): Steven K. Dew, Maria Stepanova (auth.), Maria Stepanova, Steven Dew (eds.)
Edition: 1
Publisher: Springer-Verlag Wien
Year: 2012
Language: English
Pages: 344
Tags: Nanotechnology;Nanochemistry;Nanotechnology and Microengineering;Laser Technology, Photonics
Front Matter....Pages i-viii
Front Matter....Pages 1-1
Directions in Nanofabrication....Pages 3-8
Front Matter....Pages 9-9
Fundamentals of Electron Beam Exposure and Development....Pages 11-41
Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning....Pages 43-91
Helium Ion Lithography....Pages 93-116
Nanoimprint Technologies....Pages 117-140
Front Matter....Pages 141-141
Atomic Layer Deposition for Nanotechnology....Pages 143-161
Surface Functionalization in the Nanoscale Domain....Pages 163-190
Nanostructures Based on Self-Assembly of Block Copolymers....Pages 191-216
Epitaxial Growth of Metals on Semiconductors Via Electrodeposition....Pages 217-235
Front Matter....Pages 237-237
Chemical Mechanical Polish for Nanotechnology....Pages 239-274
Deposition, Milling, and Etching with a Focused Helium Ion Beam....Pages 275-300
Laser Nanopatterning....Pages 301-319
Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania....Pages 321-344
