Microelectronics, Microsystems, and Nanotechnology: papers presented at MMN 2000, Athens, Greece, 20-22 November, 2000

Foreword......Page 8
CONTENTS......Page 10
Nanotechnology and Quantum Devices......Page 19
A New Strategy for In Situ Synthesis of Oligonucleotides Arrays for DNA Chip Technology......Page 21
Magnetotransport Properties of La-Ca-Mn-O Multilayers......Page 31
A Novel Method for the Calculation of the Local Electric Field at the Emitting Surface of a Carbon Single-Wall nanotube......Page 35
Study of Photoluminescence and Micro-Photoluminesence of V-Shaped Quantum Wires......Page 39
Catalytic Action of Ni Atoms in the Formation of Carbon Nanotubes: A Combined Ab-initio and Molecular Dynamics study......Page 43
Si Nanocrystal MOS Memory Obtained by Low-Energy Ion Beam Synthesis......Page 47
Charge Effects and Related Transport Phenomena in Nanosize Silicon/Insulator Structures......Page 51
Radiative Recombination from Silicon Quantum Dots in Si/SiO2 Superlattices......Page 55
Avalanche Porous Silicon Light Emitting Diodes for Optical Intra-Chip Interconnects......Page 59
Infrared Absorption in Strained Si/Si1-xGex/Si Quantum Wells......Page 63
Thermopower Calculations at Filling Factor 3/2 and 1/2 for Two-Dimensional Systems......Page 67
Thermoelectric Properties of Composite Fermions......Page 71
Design and Fabrication of Supported-Metal Catalysts Through Nanotechnology......Page 75
Calculated Spontaneous Emission Rates in Silicon Quantum Wires Grown in {100} Plane......Page 79
Electrical Modeling and Characterization of Si/SiO2 Superlattices......Page 83
Ge/SiO2 Thin Layers Through Low-Energy Ge+ Implantation and Annealing: Nanostructure Evolution and Electrical Characteristics......Page 87
Vertical Transport Mechanisms in nc-Si / CaF2 Multi-layers......Page 91
Photo- and Electroluminescence from nc-Si / CaF2 Superlattices......Page 95
Ab Initio Calculation of the Optical Gap in Small Silicon Nanoparticles......Page 99
Ground State Electronic Structure of Small Si Quantum Dots......Page 103
Processing......Page 107
Technology Roadmap Challenges for Deep Submicron CMOS......Page 109
Photolithographic Materials for Novel Biocompatible Lift Off Processes......Page 121
Polycrystalline Silicon Thin Film Transistors Having Gate Oxides Deposited Using TEOS......Page 125
Solid Interface Studies with Applications in Microelectronics......Page 129
A Comparison Between Point Defect Injecting Processes in Silicon Using Extended Defects and Dopant Marker Layers as Point Defect Detectors......Page 133
Rapid Thermal Annealing of Arsenic Implanted Silicon for the Formation of Ultra Shallow n+p Junctions......Page 137
Simulation of the Formation and Characterization of Roughness in Photoresists......Page 141
F2 laser (157 nm) Lithography: Materials and Processes......Page 145
Fabrication of Fine Copper Lines on Silicon Substrates Patterned with AZ 5214 Photoresist via Selective Chemical Vapor Deposition......Page 149
Investigation of the Nitridation of Al2O3 (0001) Substrates by a Nitrogen Radio Frequency Plasma Source......Page 153
Simulation of Si and SiO2 Feature Etching in Fluorocarbon Plasmas......Page 157
Epitaxial ErSi2 on Strained and Relaxed Si1-x Gex......Page 161
Development of a New Low Energy Electron Beam Lithography Simulation Tool......Page 165
CMOS Devices and Devices Based on Compound Semiconductors......Page 169
Advanced SOI Device Architectures for CMOS ULSI......Page 171
Recent Developments and Reliability of Polycrystalline Silicon Thin Film Transistors......Page 185
Different Types of Single Crystalline Gallium Nitride Thin Films Grown Directly on Vicinal (001) Gallium Arsenide Substrates......Page 189
Epitaxial Y203 on Si (001) by MBE for High-k Gate Dielectric Applications......Page 193
Performance of GaAs / AlGaAs Laser Diodes Fabricated by Epitaxial Material with Significantly Different Numbers of Quantum Wells......Page 197
Microhardness Characterization of Epitaxially Grown GaN Films. Effect of Light Ion Implantation......Page 201
Multiple Quantum Well Solar Cells Under AM1 and Concentrated Sunlight......Page 205
Processing with In Situ Diagnostic Techniques for the Integration of GaAs-based Opto-Electronic Devices Bonded on Si C-MOS Wafers......Page 211
Investigation of Different Si(111) Substrate Preparation Methods for the Growth of GaN by RF Plasma-Assisted Molecular Beam Epitaxy......Page 215
Material Properties of GaN Films with Ga- or N-Face Polarity Grown by MBE on Al2O3 (0001) Substrates Under Different Growth Conditions......Page 219
The Influence of Silicon Interstitial Clustering on the Reverse Short Channel Effect......Page 223
Noise Modeling of Interdigitated Gate CMOS Devices......Page 227
Subthreshold Characteristics of 0.15µm SOI-MOSFETs After Hot-Carrier Stress......Page 231
A Low Voltage Bias Technique to Increase Sensitivity of MOSFETs Dosimeters......Page 235
High Precision CMOS Euclidean Distance Computing Circuit......Page 239
Microsystems......Page 243
Pressure Sensors Based on 3C-SiC on Si-on-Insulator for High Temperature Applications......Page 245
Micromachined L.T.GaAs/AlGaAs Membranes as Support for 38 GHz and 77 GHz Filters......Page 252
Alternative Signal Extraction Technique for Miniature Fluxgates......Page 256
Integrated Gas Flow Sensor Fabricated by Porous Silicon Technology......Page 260
Linear Arrays of Poly Si-Ge Uncooled Microbolometers with CMOS Readout as Long Wavelength Infrared Sensors......Page 264
Silicon Capacitive Pressure Sensors and Pressure Switches Fabricated Using Silicon Fusion Bonding......Page 268
Low-Power Silicon Microheaters on a Thin Dielectric Membrane with Thick Film Sensing Layer for Gas Sensor Applications......Page 272
Microsystems for Acoustical Signal Detection Applications......Page 277
Capillary Format Bioanalytical Microsystems......Page 281
Ultrathin Nanoporous and Microporous SiO2 Coatings for Gas/Vapor Separation and Sensor Applications......Page 285
Structure Control of Microporous Carbon Coatings for Gas/Vapor Separation and Sensor Applications......Page 289
2-D Simulation of On-Chip BAW Resonators......Page 293
Theoretical Calculation of the X-Ray Photon Detector Response Fabricated on Si Gallium Arsenide......Page 297
Effectiveness of Local Thermal Isolation by Porous Silicon in a Silicon Thermal Sensor......Page 301
Thermal Conductivity of Porous Silicon Layers Probed by Micro-Raman Spectroscopy
......Page 305
A MCM-L Board for the Baseband Processor of a Dual Mode Wireless Terminal......Page 311
A CAD Tool for Automatic Generation of RNS & QRNS Converters......Page 315
MOSFET Model Benchmarking Using a Novel CAD Tool......Page 319
An HBT-BiCMOS Laser Driver with Independently Adjustable DC and Modulation Currents for High Speed Optical Interconnections......Page 323
On the Design of a Low Power Modulator/Demodulator for DECT/GSM......Page 327
Bluetooth Encryption / Decryption Algorithm Architecture and Implementation......Page 331
Passive Element Design Issues for Fully Integrated RF VCOs......Page 335
Power Amplifier Linearisation Techniques: An Overview......Page 339
Low-Power Implementation of an Encryption/Decryption System with Asychronous Techniques......Page 343
A 0.25µm CMOS Fast Current Amplifier with Leakage Current Compensation for Solid State Detector Applications......Page 347
Design and Simulation of On-Chip Bandpass Filters......Page 351
The Design of a Ripple Carry Adiabatic Adder......Page 355
Maximum Power Estimation in CMOS VLSI Circuits......Page 359
Designing a Microwave VCO 945MHz with Computer Aided Design Simulation......Page 363
Power Dissipation Considerations in Low-Voltage CMOS Circuits......Page 367
Microelectronics Networks / Technology Transfer and Exploitation......Page 371
EURACCESS: A European Platform for Access to CMOS Processing......Page 373
MMN: Greek Network on Microelectronics, Microsystems and Nanotechnology......Page 377
Technology Transfer in Action......Page 378
Supporting European Research Alliances in Microelectronics - The MINATECH project......Page 393
Simulations of Molecular Electronics......Page 398
Author Index......Page 405