This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication.
The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology.
The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).
Author(s): Lena Zentner, Steffen Strehle
Series: Mechanisms and Machine Science
Publisher: Springer
Year: 2020
Language: English
Pages: 149
City: Cham
Preface
Contents
A Novel Planar Two-Axis Leaf-Type Notch Flexure Hinge with Coincident Rotation Axes and Its Application to Micropositioning Stages
1 Introduction
2 Design of the Two-Axis Leaf-Type Notch Flexure Hinge
3 FEM-Based Investigation of the TLNFH
3.1 FEM Model
3.2 Parametric Study
3.3 Discussion of Results
4 Application to Compliant Micropositioning Stages
4.1 10-Hinge Rectilinear Stage
4.2 12-Hinge XY Stage
5 Conclusions
References
Characterization of Thin Flexure Hinges for Precision Applications Based on First Eigenfrequency
1 Introduction
2 Materials and Methods
2.1 Experiment
2.2 Theoretical Approaches
3 Results and Discussion
4 Conclusions and Outlook
References
Optimization of Compliant Path-Generating Mechanisms Based on Non-linear Analytical Modeling
1 Introduction
2 Analytical Model
2.1 Large Deflections of Rod-Like Structures
2.2 Modeling of Compliant Mechanisms as Continua
3 Verification of the Analytical Model by FEM Simulation
3.1 Analytical Solution
3.2 FEM Simulation
3.3 Results and Discussion
4 Analytical Optimization of Example Compliant Path-Generating Mechanisms
5 Conclusions
References
Modelling and Investigation of a Compliant Cable-Driven Finger-Like Mechanism
1 Introduction
2 Basic Concept of Compliant Cable-Driven Mechanism
3 Model and Simulation
3.1 Mechanical Model
3.2 Mathematical Model
4 Calculation Results
4.1 Bending Shapes Without Consideration of Gravity
4.2 Bending Shapes Under Consideration of Gravity
4.3 Bending Moment
5 Experimental Validation of the Model
5.1 Experimental Setup and Test Procedure
5.2 Test Results
6 Conclusions
References
Reconfigurable Planar Quadrilateral Linkages Based on the Tensegrity Principle
1 Introduction
2 Planar Four-Bar Linkages
2.1 Structural Assembly and Dynamic Modeling
2.2 Working Space
2.3 Reconfiguration of Quadrilateral Linkages
3 Tensegrity-Based Mechanism
3.1 Structural Topology
3.2 Mechanical Behavior
3.3 Reconfiguration of the Mechanism
4 Conclusion
References
Parameter Study of Compliant Elements for a Bipedal Robot to Increase Its Walking Efficiency
1 Introduction
2 A Model of a Compliant Element
2.1 Base Model
2.2 Semicircle
3 Evaluation and Fitting
3.1 Fitting
3.2 Application of CEs in the Robot Model
3.3 Workflow
3.4 Results
4 Conclusion and Outlook
References
Modeling, Design and Prototyping of a Pantograph-Based Compliant Mechanism
1 Introduction
2 Modeling of the Rigid-Body Mechanism
3 Design of the Compliant Mechanism
3.1 The 1st Iteration Model
3.2 The 2nd Iteration Model
3.3 The 3rd Iteration Model
3.4 The 4th Iteration Model
4 Prototyping of the Compliant Mechanism
5 Conclusion
References
Wafer Bonding in MEMS Technologies
1 Introduction
2 Engineered Substrates
2.1 High Temperature Semiconductor Wafer Bonding
3 Wafer Level Capping and Packaging
3.1 Anodic Wafer Bonding
3.2 Glass Frit Bonding
3.3 Low Temperature Direct Bonding
3.4 Other Wafer Bonding Technologies for MEMS Wafer Level Packaging
4 Summary
References
Conceptual Design of a Microscale Balance Based on Force Compensation
1 Introduction
2 System Design
3 Fabrication
4 A First Approach to Design a PID Controller
4.1 Continuous Control
4.2 Time-Discrete Control
4.3 Comparison of Continuous and Time Discrete PID Controller
5 Conclusion
References
Topology Optimization of Magnetoelectric Sensors Using Euler-Bernoulli Beam Theory
1 Introduction
1.1 Euler-Bernoulli Theory for Magnetoelectric Sensors
2 Modified Magnetoelectric Sensor Model
3 Comparison of Euler Model Against FEM Simulation
4 Sensor Topology Optimization
5 Conclusion
References
MEMS Acoustical Actuators: Principles, Challenges and Perspectives
1 Introduction
1.1 Micro-Electro-Mechanical Systems
1.2 MEMS in Mobile Devices – A Motivation for MEMS Loudspeakers
2 MEMS Loudspeaker – Actuators for Human Hearing
2.1 Loudspeaker Requirements for Earphones and Hearing Aids
2.2 Characterizing MEMS Loudspeakers
2.3 Controlling MEMS with DSP
3 Approaches to MEMS Loudspeakers
3.1 Initial MEMS Loudspeaker Designs
3.2 Latest MEMS Loudspeaker Designs
4 New Design Challenges
4.1 Thermoviscous Acoustics
4.2 Damping Due to Thermoviscous Losses
4.3 Thermoviscous Losses in Practice
4.4 Utilization of Thermoviscous Losses
5 Conclusion
References
Synthesis of Micro-robotic Appendages Considering Different Performance Properties
1 Introduction
2 Synthesis of MEMS Terrestrial Micro-robotic Appendages
2.1 Problem Definition
2.2 Parameterization
2.3 Optimization and Objective Function
2.4 Solutions of Micro-robotic Appendages
3 FEM Based Analysis of Micro-robotic Appendages
4 Conclusions
References
Author Index
