In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Author(s): T. Fukuda, Wolfgang Menz
Series: Handbook of Sensors and Actuators
Publisher: Elsevier Science
Year: 1998
Language: English
Pages: 268
Micro Mechanical Systems: Principles and Technology......Page 4
Copyright Page......Page 5
Contents......Page 8
Historical Background and Parallels to Microelectronics......Page 10
The Motivation for Microsystem Technology......Page 13
Microphysics and Design Considerations......Page 15
From the Microcomponent to the Microsystem......Page 18
Basic Concepts of Planar Processing......Page 22
Materials......Page 29
Unit Processes......Page 35
Integrated Processes......Page 53
Limitations of Planar Processes......Page 68
Basics of Micromachine Tools......Page 72
Wire Electrodischarge Grinding (WEDG)......Page 75
Micro Mechanical Machining (MMM)......Page 82
Combined Method for Micromachining......Page 88
Tribology - Friction, Lubrication and Wear......Page 92
Surface Structure and Tribilogical Contact......Page 95
Friction and Wear......Page 102
Materials for Reliable Micromechanical Systems......Page 112
Introduction......Page 124
Fabrication......Page 125
Performance of Micromechanical Sensors......Page 148
Examples of Micromechanical Sensors......Page 155
Introduction......Page 170
Electric Field Driven Actuators......Page 171
Piezoelectric Actuators......Page 179
Mechanical Transformers......Page 180
Magnetic Field Driven Actuators......Page 182
External Supply Methods and Noncontact Manipulation......Page 190
The Others......Page 199
Control Principle......Page 202
Scaling Effects......Page 210
Intelligent Control......Page 211
Man-Machine Interface......Page 217
Introduction......Page 222
Examples of Microsystems......Page 224
Examples of Micromachines......Page 242
The Complete Microsystem......Page 266
The Industrial Potential of Microsystem Technolgy......Page 270
The Importance of Standardization......Page 273
Outlook......Page 275
