The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.
Author(s): K. J. Vinoy, G. K. Ananthasuresh, Rudra Pratap, S. B. Krupanidhi (eds.)
Series: Springer Tracts in Mechanical Engineering
Edition: 1
Publisher: Springer India
Year: 2014
Language: English
Pages: 508
Tags: Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Mechanical Engineering
Front Matter....Pages i-xxvi
Front Matter....Pages 1-1
Design, Development, Fabrication, Packaging, and Testing of MEMS Pressure Sensors for Aerospace Applications....Pages 3-17
MEMS Piezoresistive Accelerometers....Pages 19-34
A Handheld Explosives Detector Based on Amplifying Fluorescent Polymer....Pages 35-47
Development of a Surface Plasmon Resonance-Based Biosensing System....Pages 49-72
Design and Development of Ion-Sensitive Field-Effect Transistor and Extended-Gate Field-Effect Transistor Platforms for Chemical and Biological Sensors....Pages 73-87
Front Matter....Pages 89-89
RF MEMS Single-Pole-Multi-Throw Switching Circuits....Pages 91-109
Piezoelectric Actuators in Helicopter Active Vibration Control....Pages 111-125
Design and Development of a Piezoelectrically Actuated Micropump for Drug Delivery Application....Pages 127-141
Development and Characterization of PZT Multilayered Stacks for Vibration Control....Pages 143-154
Development of Piezoelectric and Electrostatic RF MEMS Devices....Pages 155-177
Front Matter....Pages 179-179
Nickel–Titanium Shape Memory Alloy Wires for Thermal Actuators....Pages 181-198
Processing and Characterization of Shape Memory Films for Microactuators....Pages 199-211
Piezoceramic Coatings for MEMS and Structural Health Monitoring....Pages 213-228
Cost-Effective Processing of Polymers and Application to Devices....Pages 229-247
Chemical Synthesis of Nanomaterials and Structures, Including Nanostructured Thin Films, for Different Applications....Pages 249-263
A Study on Hydrophobicity of Silicon and a Few Dielectric Materials....Pages 265-283
Materials for Embedded Capacitors, Inductors, Nonreciprocal Devices, and Solid Oxide Fuel Cells in Low Temperature Co-fired Ceramic....Pages 285-301
Smart Materials for Energy Harvesting, Energy Storage, and Energy Efficient Solid-State Electronic Refrigeration....Pages 303-315
Front Matter....Pages 317-317
Vibratory MEMS and Squeeze Film Effects....Pages 319-338
Streaming Potential in Microflows and Nanoflows....Pages 339-353
Front Matter....Pages 317-317
A Simulation Module for Microsystems using Hybrid Finite Elements: An Overview....Pages 355-373
Structural Health Monitoring: Nonlinear Effects in the Prognostic Analysis of Crack Growth in Structural Joints....Pages 375-383
Front Matter....Pages 385-385
Smart e-Textile-Based Nanosensors for Cardiac Monitoring with Smart Phone and Wireless Mobile Platform....Pages 387-401
Polymer-Based Micro/Nano Cantilever Electro-Mechanical Sensor Systems for Bio/Chemical Sensing Applications....Pages 403-422
Smart Materials Technology for Aerospace Applications....Pages 423-437
Electronic Circuits for Piezoelectric Resonant Sensors....Pages 439-452
A Universal Energy Harvesting Scheme for Operating Low-Power Wireless Sensor Nodes Using Multiple Energy Resources....Pages 453-466
RF MEMS True-Time-Delay Phase Shifter....Pages 467-485
MEMS Sensors for Underwater Applications....Pages 487-502
Back Matter....Pages 503-508
