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MEMS and NEMS: Systems, Devices, and Structures

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This book has a misleading title. It briefly touches the surface of MEMS in the first two chapters. The rest of the book is theory of electric motors and control systems that you can find in any standard book. Nobody has built a MEMS motor yet and when that happens, the principles will be totally different as those used by the standard induction motors we know today. That's why the book is bad: describes old electric motors that cannot be built with MEMS technology. This book is non sense.

Author(s): Sergey Edward Lyshevski
Edition: 1
Publisher: CRC Press
Year: 2002

Language: English
Pages: 474
Tags: Специальные дисциплины;Наноматериалы и нанотехнологии;Нанобиотехнология;

PREFACE......Page 6
CONTENTS......Page 10
1. OVERVIEW AND INTRODUCTION......Page 14
2. NEW TRENDS IN ENGINEERING AND SCIENCE: MICRO- AND NANOSCALE SYSTEMS......Page 24
3. FUNDAMENTALS OF MEMS FABRICATION......Page 70
4. DEVISING AND SYNTHESIS OF MEMS AND NEMS......Page 122
5. MODELING OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS, DEVICES, AND STRUCTURES......Page 150
6. NANOSYSTEMS, QUANTUM MECHANICS, AND MATHEMATICAL MODELS......Page 326
7. CONTROL OF MICROELECTROMECHANICAL SYSTEMS......Page 358
8. CASE STUDIES: SYNTHESIS, ANALYSIS, FABRICATION, AND COMPUTER-AIDED-DESIGN OF MEMS......Page 406
INDEX......Page 472