MEMS and nanotechnology for gas sensors

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Author(s): Roy, Sunipa; Sarkar, Chandan Kumar
Publisher: CRC Press
Year: 2016

Language: English
Pages: 224
Tags: Автоматизация;Контрольно-измерительные приборы и автоматика;

Content: section 1. Fabrication procedure. Introduction --
Substrate for MEMS --
Deposition --
Photolithography: Pattern Transfer --
Structuring MEMS:: Micromachining --
Microheaters for Gas Sensor --
section 2. Sensor applications. Semiconductors as Gas Sensors --
Sensing with Graphene --
Nanocrystalline ZnO-Based Microfabricated Chemical Sensor --
Nanostructures for Volatile Organic Compound Detection --
Sensor Interfaces --
MEMS- and Nanotechnology-Enabled Sensor Applications.