Designed for a graduate-level course in micromachined
devices, or as an introduction to the field for practicing
engineers, this book presents an overview of the field,
beginning with-micromachining approaches and including
all major categories of transduction. It examines the
fabrication of individual devices through the study of
design issues and provides examples of key transducers,
or structures, for comparison of performances obtainable
through different approaches.
