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Introduction to Microlithography. Theory, Materials, and Processing

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Content: An introduction to lithography / L.F. Thompson --
The lithographic process : the physics / L.F. Thompson and M.J. Bowden --
Organic resist materials : theory and chemistry / C. Grant Willson --
Resist processing / L.F. Thompson and M.J. Bowden --
Plasma etching / J.A. Mucha and D.W. Hess --
Multi-layer resist systems / B.J. Lin.

Author(s): L. F. Thompson, C. G. Willson, and M. J. Bowden (Eds.)
Series: ACS Symposium Series 219
Publisher: American Chemical Society
Year: 1983

Language: English
Pages: 364
City: Washington, D.C