Faced with ever-increasing market demands, manufacturing industry is forced to seek innovation and technological breakthrough. This state-of-the-art text aims to integrate broad aspects of precision and production engineering to cope with rapid changes in market needs and technological developments as we enter the 21st century. It addresses basic theory, extensive research in advanced topics, industrial applications, and relevant surveys in related fields.
Major subjects covered by this book include:
- Advanced manufacturing systems;
- Ultra-precision machining and micro machining;
- Nanotechnology for fabrication and measurement;
- Chemo-mechanical processes;
- Rapid prototyping technology;
- New materials and advanced processes;
- Computer-aided production engineering;
- Manufacturing process control;
- Planning.
This volume contains the proceedings of the 10th International Conference on Precision Engineering (ICPE), which was held in July 2001, in Yokohama, Japan. ICPE is a well-established conference in the field of production and precision engineering, covering a wide range of topics for future-oriented manufacturing systems and processes; it is organized by the Japan Society for Precision Engineering (JSPE). This book can be used as a reference for graduate and undergraduate courses in precision and production engineering, and also for researchers and industrial engineers to capture current trends in this field.
Author(s): Ichiro Inasaki
Edition: 1
Publisher: Springer
Year: 2001
Language: English
Pages: 1008
Preliminaries......Page 1
Contents......Page 6
Machining of Precision Parts and Microstructures......Page 32
Roles of Quantum Nanostructures in Advanced Electronics......Page 41
Design of New Precision Machine Elements......Page 47
The Concept of Active Deflection Compensation and its Application in Precision Forging......Page 56
Coining of Thin Plates to Produce Micro Channel Structures......Page 61
Three-dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region......Page 66
Precision Cold Forging – Methods for Reduction of Working Pressure......Page 71
Burr Formation in Micro-Machining Aluminum, 6061-T6......Page 76
Micro Structuring of High Aspect Ratio and Array by Means of Mechanical Machining......Page 81
Influence of Micro Machining on Strength Degradation of a Silicon Nitride Ceramic......Page 86
Micro Material Processing Using UV Laser and Femtosecond Laser......Page 91
Subnanometer Fabrication of Optics by Plasma Chemical Vaporization Machining......Page 96
Micro Fabrication Using EDM Deposition......Page 101
Manufacture of Aspherical Fresnel Lens with Ideal Cross-sectional Profile with Oxygen-free Copper and Acrylic Resin......Page 106
Non-circular Machining Using Two Convex Milling Cutters......Page 111
A Method to Machine Three-Dimensional Thin Parts......Page 116
Control of Surface Pattern of Mold Generated by Ball-End Milling......Page 121
High-Speed Cutting – Fundamentals and Machine Tool Development......Page 126
Dry Cutting of Stainless Steel Using Indexable Inserts Having Self-heat Absorbing Capability......Page 131
Measurement of Lubricant Applying Effect Influence on Lubrication by Oil-Submerged Cutting......Page 136
Development of Inclined Ultrasonic-Vibration Cutting Tool Capable of Mounting Commercial Indexable Inserts......Page 141
The Greentape Laser Sintering Method and its Applications......Page 146
Conceptual Data Model for Advanced Rapid Prototyping......Page 151
Machine Parts Manufacturing by Sheet Steel Lamination Technology......Page 156
Textured Surface Produced by Anisotropic Etching of Silicon and its Frictional Properties......Page 161
A Mechanical Vibration Assisted Plasma Etcher for Etch Rate Improvement......Page 166
Micromolding of Three-Dimensional Components......Page 171
Surface Roughness of FIB Sputtered Silicon......Page 176
Optimization of Deep Hole Drilling Processes with Smallest Drilling Diameters......Page 186
Prediction of High Frequency Vibration in Fine Boring by Extended Chatter Model......Page 193
Thrust Force Analysis of Drilling Burr Formation Using Finite Element Method......Page 198
Basic Studies on the Wear Behaviour of Modified and Coated Diamond Tools for Precision Machining of Ferrous Materials......Page 203
Difference in Wear Patterns of Diamond Cutting Tool Depending on Work Materials......Page 208
Ductile Mode Cutting of Single-crystal Silicon by Ultrasonic Vibration......Page 213
Regenerative Chatter Vibration in Ball End Milling of Curved Surfaces......Page 218
Ultra-High Speed Discharge Control for Micro Electric Discharge Machining......Page 223
Study of Contouring Micro EDM Characteristics......Page 228
Development of Desk-top Micro Electric Discharge Machine......Page 233
Improving Process Characteristics of DRY-WEDM......Page 238
U-shaped Curved Hole Creation by Means of Electrical Discharge Machining......Page 243
High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM......Page 248
Laser Ablation of Sapphire with a Pulsed Ultra-Violet Laser Beam......Page 253
Metal Deposition on Glass by Laser Irradiation from Metal Powders......Page 258
Ultra-Precision Cutting of Difficult-to-cut Metals......Page 263
A Study on Metal Cutting under High Hydrostatic Pressure......Page 268
A New Interpolation Algorithm for Ultra-precision CNC Machining......Page 273
Six-Axis Control Character Line Finishing Using Ultrasonic Vibrational Cutting Tool......Page 278
A New Diamond Turning Method for Fabrication of Convex Aspheric Surface on Hard Brittle Material......Page 283
Fracture Phenomena of Aramid Fiber During Oblique Cutting......Page 288
Development of a Practical Laser-Guided Deep-Hole Boring Tool: Working Characteristics of Its Components......Page 293
Oil Film on Water Fog Metalworking Fluid......Page 298
On the On-set of Chip Formation and the Process Stability in Cutting at Atomic Level......Page 303
Analysis of Tool Temperature in High-Speed Milling......Page 308
Research on Precise Cutting Performance of CVD Diamond......Page 313
Machinability of TiAl Intermetallic Compounds......Page 318
MDS Study on the Effect of Cutting Edge Radius of Diamond Tools in Nanometric Cutting Process for Brittle Materials......Page 323
An Attempt to Develop a Short Lasting Machinability Test for Steels......Page 328
Micro Surface Damage Detecting and Repairing System by Precise Micro Robots......Page 333
Effect of Minimal Quantities of Lubricant in Micro Milling......Page 338
Development of MEMS IC Probe Card Utilizing Fritting Contact......Page 343
Simulation of WEDM Using Discharge Location Searching Algorithm......Page 348
Comparative Study of HSM and EDM in Injection Mould Manufacturing......Page 353
Net-Shaping via Aluminium Foaming......Page 358
Development of Warm Forming Technique to Produce Thin Wall Magnesium Components......Page 363
Gas Flow Characteristics in a Laser Cut Kerf......Page 368
A New Method for Reduction of Residual Stress of Welded Joint Using Ultrasonic Vibrational Load......Page 373
Three-dimensional Microcasting......Page 378
Improvement of Properties of SiC Mirror Surface Epitaxially Grown on Silicon Substrate......Page 383
Precision Grinding of Micro Aspherical Surface......Page 390
Mirror Grinding of Silicon Wafer with Silica EPD Pellets......Page 395
New Fabrication Process of Deep Paraboloidal Mirror by Combination of ELID-Grinding and Electro-forming Techniques for Laman Spectroscopy Instrument......Page 400
A Study on the Surface Integrity of Single Crystal Silicon Ground by CIFB-diamond Wheels (ELID) and Resin-bonded Diamond Wheels......Page 405
A Study on Scratch Reduction Using the Sonic Dispersion of CMP Slurry......Page 410
A Study on the Chemical Mechanical Micro Machining (C3M) of Silicon......Page 415
Development of a Lapping Film Utilizing Agglomerative Superfine Silica Abrasives for Edge Finishing of a Silicon Wafer......Page 420
Cryogenic Polishing Method of Optical Materials......Page 425
Characteristics of Small Rotary Tool in Polishing of Fused Silica......Page 430
Development of Electrostrictive Polyurethane(PU) Films and its Characterization......Page 435
Precision Machining of Future Silicon Wafers......Page 440
High Speed Grinding Performance and Material Removal Mechanism of Silicon Nitride......Page 445
Precision Manufacturing of Micro Moulding Tools of Glass and Sintered Carbide......Page 450
An Experimental Study on Bore Honing Operation - Influence of Unequal Over-run on Geometrical Error......Page 455
Investigations Regarding the Operating Range of Ultra Thin Grinding Wheels on AlTiC......Page 460
Errors Analysis of Ball-Headed Wheel Discharge Dressing and Study on Grinding Experiments in Ultra-precision Aspheric Grinding System......Page 465
Simulation on High Integrity Surface Generation of Φ300 Si Wafer with Fixed-Abrasive Solution......Page 470
Effect of Wheel Revolutional Speed on Striped Pattern on Surfaces Finished by High-Speed Reciprocation Grinding......Page 475
Mechanisms for the Formation of Glossy Workpiece Surface in Grinding and Polishing of Natural Stones......Page 480
Mechanical Properties and Grinding Characteristics of High Purity Polycrystalline CBN Grits......Page 485
Influence of Cutting Edge Wear on Ductile-mode Grinding of Fine Ceramics with Coarse Grain Size Diamond Wheel......Page 490
Study on Internal Grinding of Small Bore - Influence of Bearing Characteristics on Grinding Accuracy......Page 495
A Basic Study on Profile Grinding with ELID......Page 500
Grinding Characteristics of Cemented Carbide Concave Mirror by Desk-top Type 4-Axes Machine "TRIDER-X" with ELID System......Page 505
Finish Surface Grinding of Titanium Alloys......Page 510
Flattening of Micro-Functional Parts by ELID Lap Grinding......Page 515
Development of Small Tool by Micro Fabrication System Applying ELID Grinding Technique......Page 520
Effect of Polishing Pads in Finishing of Large Optical Elements......Page 525
Effects of Changes in Fluid Composition on Magnetorheological Finishing (MRF) of Glasses and Crystals Finishing (MRF) of Glasses and Crystals......Page 530
Study of Magnetic Abrasive Finishing Process Using Pulsed Finishing Pressure and Its Processing Characteristics......Page 535
Chain Forming Process of Magnetic Brush Development System Used in Laser Printer......Page 540
Precision Machine Tools......Page 548
Effects of Bearing Surface Geometries on the Inclination Stiffness of Aerostatic Thrust Bearings......Page 553
Development of a Three Axes Travelling Column Ultraprecision Milling Machine......Page 558
Development of Hydrostatic Bearings with Groove Structures......Page 563
Assessment of Thermophysical Properties at Design Stage of Machine Tool Structure with Thermal Symmetricity......Page 568
Concrete-Based Constrained Layer Damping......Page 573
Effects of Manufacturing Errors on the Accuracy for TRR-XY Hybrid PKM......Page 578
Effect of Static Stiffness of Grinding Systems on a Generating Mechanism of Workpiece Geometrical Accuracy......Page 583
Development of a New Reseatable Mechanism with High Accurate Positioning Reproducibility......Page 588
Compensation of Periodic Errors by Gain Tuning in Multi-Probe Sensors......Page 593
Precision Positioning of a Surface Motor-Driven XYθz Stage Using a Surface Encoder......Page 598
Feedforward Tracking Controller Design Based on a Limited Bandwidth Desired Model......Page 603
Fuzzy-PID Hybrid Vibration Control of Slide Carriage of Ultraprecision Machine Tool......Page 608
Nanometrology - The Frontier of Precision......Page 613
Development of Ultraprecision 5-Axis Machine Tool Equipped with Elliptical Vibration Cutting Device......Page 618
Development of On-machine Profile Measuring System with Contact-type Probe......Page 623
An Instrument to Measure the Stiffness of MEMS Mechanisms......Page 628
Development of X-ray Stepper with High Overlay Accuracy for 100-nm LSI Lithography......Page 633
Wide Range Capacitive Gap Sensor with Reproducible Nano-meterorder Resolution......Page 638
Design and Development of Multi-Function Sensor Using a Group of Micro Cantilevers......Page 643
A Tool to Estimate the Adhesive Forces between Microcomponents Among each other and between Microcomponents and Grippers or Magazines......Page 648
High Precision Collimation Using Talbot Interferometry......Page 653
A Novel Approach for Simultaneous Measurement of the Linear Guide way Errors of a Machine Tool with a Volumetric Optical Encoder......Page 658
Evaluation of Stages of Nano-CMM......Page 663
Evaluation Method of Thermal Displacement of Machine Tools......Page 668
Taut Wire Straightedge Reversal Artifact......Page 673
Automated System for Three-Dimensional Roughness Testing......Page 678
Development of Micro-roughness Measuring Probe Using Longitudinal Tapping Mode by Ultrasonic Vibration Sensor......Page 683
Effects of Surface Roughness of Si Substrate and Pt-C Multilayer Coated Film on X-Ray Reflectivity......Page 688
Detection of Surface Defects on Steel Ball in Bearing Production Process Using a Capacitive Sensor : Performace of Prototype System......Page 693
Advanced 3D-Measuring Techniques for Quality Control of Cutting Inserts......Page 698
Autonomous Profiling Measurement of Two Dimensional Section Forms Using Small-sized Ultrasonic Probe......Page 703
Interferometry with Null Optics for Testing Aspherical Surfaces at 1nm Accuracy......Page 708
Analysis of Defects on Sio2 Filmed Wafer -Evaluation of CMP Defect Detection Schemes Using Computer Simulation(BEM)......Page 713
Palmtop Pantograph Mechanism with Large-Deflective Hinges for Miniature Surface Mount Systems......Page 718
Dynamics of Pin Electrode in Pin-To-Plate Gas Discharge System Used for Ozone-less Charger in Laser Printer......Page 723
Effects of Part Flexibility on Dynamic Behaviors of Machine Systems with Clearances in the Joints......Page 728
Analysis of Feed Drive System of X-Y Table Considering the Friction......Page 733
Rotational Accuracy and Positioning Resolution of an Air-bearing Spindle with Active Inherent Restrictors......Page 738
Precision Control of Radial Magnetic Bearing......Page 743
The Effects of Joint Clearance on the Motion Precision of the Machines......Page 748
Tool Trajectory Error for Table-tilting Machines......Page 753
Automated Calibration for Assembly Device Installation Based on Plug & Produce Concept......Page 758
Calibration of 2-DOF Parallel Mechanism......Page 763
Development of a Calibration Equipment Using Laser Interferometer Combining a Variable Length Vacuum Cell - Structure and Measurement......Page 768
Development of Calibration Equipment Using Laser Interferometer Combining a Variable Length Vacuum Cell - Control and Application......Page 773
A Measurement Force Estimation Method of Tapping Stylus......Page 778
Investigation of the Plastic Deformation and Fracture of Carbon Nanotubes......Page 783
Molecular Dynamics Simulation on Dependence of Atomic-Scale Stick-Slip Phenomenon upon Probe Tip Shape......Page 788
Tool Wear Monitoring in Milling Process with Laser Scan Micrometer......Page 793
Study on a Modified Concave Filter for Multi-Oscillating Modalities Compensation in Ultra-Precision Machine Tool......Page 798
New Practical Control of Point-To-Point Positioning Systems: Robustness Evaluation......Page 803
The Research of an Intelligent Open CNC System......Page 808
Robot Intelligence Augmented by Information Technology......Page 813
Standard API for Open-Architecture CNC and it’s Application to HMI and Operation Monitoring......Page 818
Development of Large Ultraprecision Mirror Surface Grinding System with ELID......Page 823
Development of a New Measurement System for Straightness Error by a Heterodyne Interferometer with a Grating......Page 828
Development of Measuring System Equipped with Wire Probe to Measure Fine Contour Shape of Penetrated Specimen......Page 833
Development of Ultra Precision Long End Standard Installing Vacuumed Optical Path Laser Interferometer......Page 838
Flatness Measurement System Using Fizeau Type Solid Interferometer with High Speed Acquiring Multi-phase Interferograms and Highly Effective Error Decreasing Algorithm......Page 843
Proposal of Absolute Length Measuring Machine by Combining Crystalline Lattice Scale and Laser Interferometry......Page 848
Evaluation of Acceleration and Deceleration Profile of Velocity and a New Design Method Using Gaussian Distribution Curve......Page 853
Thermal and Mechanical FEA (Finite Element Analysis) of Wafer Heating for EB Stepper......Page 858
Modeling of Machining Process Planning based on Inverse Form-Shaping Function......Page 866
Easy Construction of 3D Model from 2D Information......Page 871
Virtual Reality for NC-programming......Page 876
Development and Estimation of Case Retrieval Model For Machining Knowledge Support System on Machine Design......Page 881
Integrated Process Planning and Production Control -A Flexible Approach Using Co-operative Agent Systems......Page 886
Dynamic Job Shop Scheduling Using a Neural Network: Multistage Training and Selection of Input Information......Page 891
An Organizational Concept for Manufacturing of High Precision Products......Page 896
Considering Feature Interactions for the Development of a Process Planning System......Page 901
Strategic Product Development Decision-making Based on Optimization Incorporating the QFD Method......Page 906
Development of a Logistic Operating Curve for an Entire Manufacturing Department -Logistic Process Operating Curve (LPOC)......Page 911
Fixturing Feature for Determining Optimum Clamping Points: Concept of Fixturing Feature and Its Application to 2-D and 3-D Workpiece Models......Page 916
Feature-Based Fixture Planning for Workpieces......Page 921
Simulation of Manufacturing System Design for Uncertain Market Conditions......Page 926
Construction of Master Model from 3D Scanned Data Using Recursive Subdivision Scheme......Page 931
A Study on Knowledge Engineering for Equipment Design and Production......Page 936
Life Cycle Support of Mechanical Products Using Network Agent......Page 941
Aesthetic Design Based on “Kansei Language”......Page 946
A Design Review and Redesign System for NURBS Models with a Haptic Device......Page 951
Free-form Surface Manufacture for TRR-XY Hybrid Parallel Link Machine Tool......Page 956
Manufacturing Process Control Based on the Delta Operator......Page 961
Assembly Reliability Evaluation Method (AREM)......Page 966
Maintenance Support System Equipped with Monitoring Function......Page 971
Development of Software Platform for Realizing the Dynamic Reconstruction of Software Applications of Manufacturing Systems......Page 976
Mechatronic Service and Investigation on the Example of a Forming and Milling Machine......Page 981
Gaussian-Based Free Form Deformation and its Application to Fashion Design......Page 986
A Proposal of Assembly Model Framework Specialized for Unified Parametrics......Page 991
Precision Machining of Thin-Walled Workpiece by NC Compensating Deflection......Page 996
Index of Contributors......Page 1002
