“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
Author(s): Hartmut Frey Prof. Dr., Hamid R. Khan Prof. Dr. (eds.)
Edition: 1
Publisher: Springer-Verlag Berlin Heidelberg
Year: 2015
Language: English
Pages: 379
Tags: Surfaces and Interfaces, Thin Films; Characterization and Evaluation of Materials; Nanotechnology; Tribology, Corrosion and Coatings; Physical Chemistry; Optical and Electronic Materials
Front Matter....Pages i-xiii
Applications and Developments of Thin Film Technology....Pages 1-3
Relevance of the Vacuum Technology for Thin Film Coatings....Pages 5-12
Vacuum Evaporation....Pages 13-71
Basic Principle of Plasma Physics....Pages 73-115
Gaseous Phase and Surface Processes....Pages 117-132
Cathode Sputtering....Pages 133-165
Plasma Treatment Methods....Pages 167-179
Particle Beam Sources....Pages 181-224
Chemical Vapor Deposition (CVD)....Pages 225-252
Physical Basics of Modern Methods of Surface and Thin Film Analysis....Pages 253-278
Insitu Measurements....Pages 279-299
Measurements of Thin Layers After the Coating Process....Pages 301-355
Nanoparticle Films....Pages 357-374
Back Matter....Pages 375-379
