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Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)

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A concise, comprehensive overview of sputter deposition technology?a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

Author(s): Kiyotaka Wasa, Shigeru Haber
Year: 1993

Language: English
Pages: 316
Tags: Физика;Физика твердого тела;

HANDBOOK OF SPUTTER DEPOSITION TECHNOLOGY......Page 4
MATERIALS SCIENCE AND PROCESS TECHNOLOGY SERIES......Page 6
Preface......Page 8
Contents......Page 10
1 THIN FILM MATERIALS AND DEVICES......Page 14
2 THIN FILM PROCESSES......Page 23
3 SPUTTERING PHENOMENA......Page 62
4 SPUTTERING SYSTEMS......Page 94
5 DEPOSITION OF COMPOUND THIN FILMS......Page 137
6 MICROFABRICATION BY SPUTTERING......Page 288
7 FUTURE DIRECTIONS......Page 304
APPENDIX......Page 307
INDEX......Page 309