Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions

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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Author(s): Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber
Series: Materials science and process technology series
Publisher: Noyes Publications
Year: 1990

Language: English
Pages: 535
City: Park Ridge, N.J., U.S.A
Tags: Физика;Физика плазмы;