Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Author(s): Stephen M. Rossnagel, William D. Westwood, Jerome J. Cuomo
Edition: 1
Publisher: William Andrew
Year: 1991

Language: English
Pages: 546
Tags: Физика;Физика плазмы;Научные статьи и сборники