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Handbook of optical dimensional metrology

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''The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices Read more...

Author(s): Kevin G Harding
Series: Series in optics and optoelectronics
Publisher: CRC Press/Taylor & Francis
Year: 2013

Language: English
Pages: xiii, 492 p.
City: Boca Raton
Tags: Информатика и вычислительная техника;Обработка медиа-данных;Обработка изображений;


Content: Pt. 1. Optical metrology : introduction --
pt. 2. Optical metrology of larger objects --
pt. 3. Optical metrology of medium size objects --
pt. 4. Optical micro-metrology of small objects --
pt. 5. Advanced optical micro-metrology methods.
Abstract: ''The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques''