The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale.The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up.In this book Professor Richard Leach, of the UK's National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale.Key topics covered include:Basic metrological terminology, and the highly important topic of measurement uncertainty.Instrumentation, including an introduction to the laserMeasurement of length using optical interferometry, including gauge block interferometryDisplacement measurement and sensorsSurface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisationCoordinate metrologyLow mass and force metrologyAbout the AuthorProfessor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Author(s): Richard Leach
Publisher: William Andrew
Year: 2009
Language: English
Pages: 352
Tags: Специальные дисциплины;Наноматериалы и нанотехнологии;
Fundamental Principles of
Engineering Nanometrology......Page 4
Copyright
......Page 5
Contents......Page 6
Acknowledgements......Page 16
Figures......Page 18
Tables......Page 26
CHAPTER 1
Introduction to metrology for micro- and nanotechnology......Page 28
1.1
What is engineering nanometrology?......Page 29
1.2
The contents of this book......Page 30
1.3
References......Page 31
2.1
Introduction to measurement......Page 32
2.2
Units of measurement and the SI......Page 33
2.3
Length......Page 34
2.4
Mass......Page 37
2.5
Force......Page 39
2.6
Angle......Page 40
2.7
Traceability......Page 41
2.8
Accuracy, precision, resolution, error and uncertainty......Page 42
2.10
References......Page 58
CHAPTER 3 -
Precision measurement instrumentation - some design principles......Page 62
3.2
Kinematic design......Page 63
3.3
Dynamics......Page 65
3.4
The Abbe Principle......Page 67
3.5
Elastic compression......Page 68
3.6
Force loops......Page 70
3.7
Materials......Page 71
3.8
Symmetry......Page 73
3.9
Vibration isolation......Page 74
3.10
References......Page 79
4.1
Traceability in length......Page 82
4.2
Gauge blocks - both a practical and traceable artefact......Page 83
4.3
Introduction to interferometry......Page 85
4.4
Interferometer designs......Page 91
4.5
Gauge block interferometry......Page 99
4.6
References......Page 109
5.1
Introduction to displacement measurement......Page 112
5.2
Displacement interferometry......Page 113
5.3
Capacitive displacement sensors......Page 126
5.4
Inductive displacement sensors......Page 127
5.5
Optical encoders......Page 129
5.6
Optical fibre sensors......Page 131
5.7
Calibration of displacement sensors......Page 133
5.8
References......Page 138
6.1
Introduction to surface topography measurement......Page 142
6.2
Spatial wavelength ranges......Page 143
6.3
Historical background of classical surface texture measuring instrumentation......Page 144
6.4
Surface profile measurement......Page 147
6.5
Areal surface texture measurement......Page 148
6.6
Surface topography measuring instrumentation......Page 149
6.7
Optical instruments......Page 153
6.8
Capacitive instruments......Page 182
6.10
Calibration of surface topography measuring instruments......Page 183
6.11
Uncertainties in surface topography measurement......Page 189
6.12
Comparisons of surface topography measuring instruments......Page 192
6.13
Software measurement standards......Page 194
6.14
References......Page 195
CHAPTER 7
Scanning probe and particle beam microscopy......Page 204
7.1
Scanning probe microscopy......Page 205
7.2
Scanning tunnelling microscopy......Page 207
7.3
Atomic force microscopy......Page 208
7.4
Scanning probe microscopy of nanoparticles......Page 225
7.5
Electron microscopy......Page 226
7.6
Other particle beam microscopy techniques......Page 231
7.7
References......Page 234
8.1
Introduction to surface topography characterization......Page 238
8.2
Surface profile characterization......Page 239
8.3
Areal surface texture characterization......Page 256
8.4
Fractal methods......Page 278
8.5
Comparison of profile and areal characterization......Page 284
8.6
References......Page 285
9.1
Introduction to CMMs......Page 290
9.2
Sources of error on CMMs......Page 295
9.3
Traceability, calibration and performance verification of CMMs......Page 296
9.4
Miniature CMMs......Page 299
9.5
Miniature CMM probes......Page 302
9.6
Calibration of miniature CMMs......Page 308
9.7
References......Page 312
10.1
Traceability of traditional mass measurement......Page 316
10.2
Low-mass measurement......Page 324
10.3
Low-force measurement......Page 325
10.4
References......Page 335
Appendix A SI units of measurement and their realization at NPL......Page 338
SI derived units with special names and symbols......Page 342
Index......Page 344
