Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.
The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.
Author(s): Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni, Annarita Laricchiuta, Savino Longo (auth.)
Series: Springer Series on Atomic, Optical, and Plasma Physics 85
Edition: 1
Publisher: Springer-Verlag New York
Year: 2016
Language: English
Pages: XVI, 318
Tags: Plasma Physics; Physical Chemistry; Theoretical, Mathematical and Computational Physics; Mechanics
Front Matter....Pages i-xvi
Electron-Molecule Collision Cross Sections and Rate Coefficients for Processes Involving Excited States....Pages 1-30
Reactivity and Relaxation of Vibrationally/Rotationally Excited Molecules with Open Shell Atoms....Pages 31-56
Formation of Vibrationally and Rotationally Excited Molecules During Atom Recombination at Surfaces....Pages 57-78
Kinetic and Monte Carlo Approaches to Solve Boltzmann Equation for the Electron Energy Distribution Functions....Pages 79-111
Superelastic Collisions and Electron Energy Distribution Function....Pages 113-142
Collisional-Radiative Models for Atomic Hydrogen Plasmas....Pages 143-173
Vibrational Kinetics....Pages 175-204
Particle Models for Low Pressure Plasmas....Pages 205-222
Self-Consistent Kinetics of Molecular Plasmas: The Nitrogen Case....Pages 223-245
Negative Ion H− Kinetics for Fusion....Pages 247-273
Non Equilibrium Plasma in High Enthalpy Flows....Pages 275-303
Toward the Activation of Polyatomic Molecules by eV Processes: The CO2 Case Study....Pages 305-312
Back Matter....Pages 313-318
