Fabrication of Micro/Nano Structures via Precision Machining: Modelling, Processing and Evaluation

Preface
Contents
About the Editors
Part I Fabrication of Micro/Nano Structures via Precision Mechanical Machining
1 Introduction to Precision Machining Micro/Nano Structures
1 Micro/Nano Structures Fabrication Methods
2 Principal Cutting Movement in Micro/Nano Structures Machining
3 Asistted Cutting Movement in Micro/Nano Structures Machining
4 Summary and Outlook
References
2 Tool Offset Flycutting Straight-Groove-Type Microstructures
1 Introduction
2 Machining System
2.1 The OTSEF System
2.2 Tool Path Planning
2.3 Mathematical Modeling
3 Experiments and Results Analysis
3.1 Experiment Setup
3.2 Results and Discussion
4 Conclusions
References
3 Tool Offset Flycutting Multi-layer Hierarchical Microstructures
1 Introduction
2 Fabrication of HMs Using OTSEF System Integrating STS
2.1 Tool Path Modeling for Micro-lens Unit Machining
2.2 Tool Path Modeling for Micro-lens Array Machining
2.3 Fabrication of Micro-lens Unit and Array
2.4 Tool Path Planning and Fabrication of MLU-SPM
2.5 Machining Error Compensation and Analysis
2.6 Fabrication of L-1SPM and L-2SPM
3 Fabrication of HMs Using the OTSEF System Integrating FTS
3.1 Tool Path Modeling for Micro-lens Array Machining
3.2 Simulation and Prediction of Path Planning
3.3 Fabrication of Micro-lens Array
3.4 Fabrication of Microstructures Using Sinusoidal Excitation
3.5 Fabrication of Multi-scale Microstructure
4 Conclusions
References
4 Tool Offset Flycutting Micro-optics Arrays with High-Aspect-Ratio
1 Introduction
2 Rules for Flexible MOAs Creation
3 The Assurance of OTS Cutting Tool Track
3.1 Athletics of the OTS
3.2 Determining the Cutting Tool Track
3.3 Features of the Cutting Tool Track
4 Experimental Setup
5 Results and Discussion
5.1 Miniature Spherical Arrays
5.2 Miniature Free-Form Lenticles Array
6 Conclusions
References
5 Diamond Milling System for Fabricating Infrared Micro-optics Arrays
1 Introduction
2 Processing Principle for Self-tuned Diamond Milling
3 Toolpath Decision for STDM
3.1 Toolpath Programming Algorithm
3.2 Characteristics of the Toolpath
4 Growth of STDM System and Experimental Setup
5 Results and Discussion
6 STDM for Sinusoidal Microgrooves
6.1 Simulation of STDM for Sinusoidal Microgrooves
6.2 Results and Discussion of STDM for Sinusoidal Microgrooves
7 Conclusions
References
6 Cutting Force and Energy Modelling in Ultra-Precision Machining of Micro-structures
1 Introduction
2 Evaluation of Cutting Forces for Fabricating Microgrooves
2.1 Theoretical Models for Prediction of Cutting Forces
2.2 Materials and Experimental Procedures
2.3 Serrated Chip Formation and Cutting Temperature Evolution
2.4 Cutting Force Validation
2.5 Spring Back Force Analyses
3 Evaluation of Cutting Energy in Machining of MLAs
3.1 Cutting Energy Models for Fabricating MLAs
3.2 Materials and Experimental Procedures
3.3 Surface Topographies of the MLAs
3.4 Evaluation of Material Removal Energies for Fabricating MLAs
3.5 Generation Mechanism of Surface Damages
4 Conclusions
References
Part II Fabrication of Micro/Nano Structures via Electrical Discharge Machining (EDM)
7 Introduction to Electrical Discharge Machining Micro/Nano Structures
1 Introduction
2 Preparation of Micro Electrode for 3D Micro-EDM
2.1 Wire Electrical Discharge Grinding (WEDG)
2.2 Block Electrode Discharge Grinding (BEDG)
3 3D Micro-structures Fabricating by 3D Micro-EDM
4 Summary and Outlook
References
8 Fabrication of 3D Micro-electrode and Its Application in Micro-EDM
1 Introduction
2 The Preparation of 3D Microelectrode
2.1 Preparation Method
2.2 Wire-EDM of Cu Foil
2.3 DFW of 3D Microelectrode
3 Preparation of 3D Microelectrode and Its Application in the Micro-EDM of 3D Microstructure
3.1 Processing 3D Microstructure with Single 3D Microelectrode
3.2 3D Microstructure Machined by 3D Microelectrode Array
4 Conclusions
References
9 Fabrication of Micro-structures by Applying Cu-Sn 3D Micro-electrode
1 Introduction
2 Experimental Materials and Equipment
3 Principle of Reverse-Polarity Micro-PMEDM of Bundled 3D-Laminated Microelectrode
3.1 Technological Process
3.2 Effects of Powder on the Working Surface of Laminated Electrode
4 Elimination of Discharge Ridges on Microstructure Bottom Surface
4.1 Concentrations of Gr and Cu Powders
4.2 Voltage Ton and Toff
4.3 Machining Voltage U
5 Fabrication of 3D Microstructure
5.1 Typical 3D Microelectrodes
5.2 Micro-EDM 3D Microstructure Without Powder
5.3 Reverse-Polarity Micro-PMEDM 3D Microstructure
6 Conclusions
References
10 Fabrication of Micro-grooves by Applying Laminated Disc Electrodes
1 Introduction
2 Process of the LDE Fabrication
2.1 Method
2.2 Relative Volume Wear Ratio
3 Experiments
4 EDM of Cu/CuSn/Sn/CuSn/Cu Structured LDE
4.1 Wears of a Single Disc Foil Electrode and LDE During the EDM Process
4.2 WV-EDM Formation of the LDE
4.3 Preparation of Surface Microgroove Structures
5 EDM of Cu/Sn/Cu Structured LDE
5.1 WV-EDM Formation of the LDE
5.2 Relative Volume Wear Rate
5.3 Simulation of Flow Field in the Machining Gap of the LDE During EDM
5.4 Fabrication of Microstructures by EDM with the LDE
6 Conclusions
References
11 Fabrication of Blind Multi-microgrooves by Applying Long-Laminated Electrode
1 Introduction
2 Experiments
2.1 Methods
2.2 Process of Manufacturing RCLs
2.3 Experimental Materials and Setup
2.4 Experimental Conditions
3 Results and Discussion
3.1 RCL on the Sidewalls of the LLE
3.2 Machining Polarity
3.3 Electrode Length
3.4 Machining Depth
4 LLE Forming and Blind Microgroove Structure Production
5 Conclusions
References
12 Geometric Evolution of Microstructures in EDM with Composite Laminated Electrode
1 Introduction
2 Experimental Equipment and Materials
3 Modeling of EDM with the CuSn Composite Laminated Electrode
3.1 Modeling of the Composite Laminated Electrode
3.2 The Radius of the Discharge Crater
3.3 Discharge Distance
3.4 The Discharge Erosion Strategy of the Simulation Model
3.5 The Flowchart of the Simulation Model
4 Examples and Experimental Verification
4.1 Calculation of the Model Error
4.2 The Simulation and Experimental of Cu/Sn/Cu Laminated Electrode
4.3 The Simulation and Experimental of Cu/CuSn/Cu Laminated Electrode
5 Conclusions
References
Part III Fabrication of Micro/Nano Structures via Precision Grinding and Injection Molding
13 Introduction to Precision Grinding and Injection Molding Micro/Nano Structures
1 Machining Technique of Micro-structure
2 Truing Technique of Diamond Grinding Wheel
3 Polishing Technique of Micro-structured Mold Core
4 Summary and Outlook
References
14 Precision Dressing and Truing of Diamond Grinding Wheel with V-tip
1 Introduction
2 V-tip Truing of #600 Diamond Grinding Wheel Using Dry ECD
2.1 Experimental Setup of Dry ECD for #600 Diamond Grinding Wheel
2.2 Results and Discussions
3 V-tip Truing of #1200 Diamond Grinding Wheel Using Dry ECD
3.1 Experimental Setup
3.2 Experimental of Dry Micro-grinding
3.3 Measurements
3.4 Results and Discussions
3.5 Morphology of Fine Trued Tip Diamond Grinding Wheel
3.6 Influences of Impulse Discharge Parameters on V-tip Profiles of Diamond Grinding Wheel
3.7 Influences of Impulse Discharge Parameters on V-tip Angle of Diamond Grinding Wheel
3.8 Influences of Impulse Discharge Parameters on V-tip Radius of Diamond Grinding Wheel
3.9 Micro-topography and Form-Accuracy of Ground Micro-structured Cemented Carbide Surface
4 Conclusions
References
15 Precision Grinding of Micro-structures of Hard-Brittle Material Surfaces
1 Introduction
2 Experimental
2.1 V-Tip-Dressing Experiment of Grinding Wheel
2.2 Experiment of V-Groove Structure Machining of Ceramics
3 Micro-structure Grinding of Ceramics and Ceramic Matrix Composites
4 Micro-structure Grinding of Single Crystal Silicon Carbide and Sapphire
5 Conclusions
References
16 Precision Grinding and Polishing of Optical Micro-structured Surface
1 Introduction
2 Maskless Fluid Jet Polishing Methods
3 Experimental Procedures
4 Results and Discussion
4.1 Polishing Performance on the Sinusoidal Structured Array Surface
4.2 Polishing Performance on V-groove Structured Array Surface
4.3 Computational Fluidic Dynamics (CFD) Simulation
4.4 Analysis of the Effect of Key Polishing Parameters
5 Conclusions
References
17 Fabrication of Micro-structured Polymer Via Precision Grinding and Injection Molding
1 Introduction
2 Materials and Methods
2.1 Micro-grinding of Mold Core with V-Grooved Array Structures
2.2 Micro Injection Molding of Micro-structured Polymers
2.3 Measurement of Micro-grooved Mold Cores and Polymers
3 Results and Discussions
3.1 Surface Topographies and Profiles of Micro-ground Mold Core
3.2 Surface Topographies and Profiles of Micro-structured Polymers
3.3 Machining Accuracy of Micro-ground Mold Core and Filling Rate of Micro-formed Polymer
3.4 Surface Quality Analysis of Mold Core and Injection Molded Polymers
3.5 Relationship Between the Filling Ratio of Micro-structured Polymer and the Form Accuracy of Micro-ground Mold Core
3.6 Effects of Micro Injection Molding Parameters on the Filling Rate of Micro-structured Polymer
4 Conclusions
References
18 Fabrication of Micro-structured LED Diffusion Plate Via Precision Grinding and Injection Molding
1 Introduction
2 The Optical Design and Light Efficiency Simulation of the Micro-structured LED Diffusion Plate
3 Experimental Details
3.1 Precision Truing of the V-Tip CBN Grinding Wheel
3.2 Precision Grinding of the Micro-structured Mold Core
3.3 Micro Injection Molding of the Micro-structured LED Diffusion Plate
3.4 Light Efficiency Testing of the Micro-structured LED Diffusion Plate
4 Results and Discussion
4.1 Truing Accuracy of the Grinding Wheel V-Tip
4.2 Photos and Surface Topographies of the Micro-ground Mold Core and the Injection Molded Micro-structured Diffusion Plate
4.3 The Section Profiles of the Micro-structured Mold Core and Diffusion Plate
4.4 Light Efficiency Analysis of the Micro-structured LED Diffusion Plate
5 Conclusions
References