Encyclopedia of Materials Characterization: Surfaces, Interfaces, Thin Films (Materials Characterization Series)

Cover......Page 1
Half Title Page......Page 4
Title Page......Page 6
Copyright......Page 7
Table of Contents......Page 8
Preface to Series......Page 12
Preface......Page 13
Acronyms Glossary......Page 14
Contributors......Page 19
1.0 Introduction......Page 24
2.0 Introduction......Page 80
2.1 Light Microscopy......Page 83
2.2 SEM Scanning Electron Microscopy......Page 93
2.3 STM and SFM Scanning Tunneling Microscopy and Scanning Force Microscopy......Page 108
2.4 TEM Transmission Electron Microscopy......Page 122
3.0 Introduction......Page 140
3.1 EDS Energy-Dispersive X-Ray Spectroscopy......Page 143
3.2 EELS Electron Energy-Loss Spectroscopy in the Transmission Electron Microscope......Page 158
3.3 CL Cathodoluminescence......Page 172
3.4 STEM Scanning Transmission Electron Microscopy......Page 184
3.5 EPMA Electron Probe X-Ray Microanalysis......Page 198
4.0 Introduction......Page 216
4.1 XRD X-Ray Diffraction......Page 221
4.2 EXAFS Extended X-Ray Absorption Fine Structure......Page 237
4.3 SEXAFS/NEXAFS Surface Extended X-Ray Absorption Fine Structure and Near Edge X-Ray Absorption Fine Structure......Page 250
4.4 XPD and AED X-Ray Photoelectron and Auger Electron Diffraction......Page 263
4.5 LEED Low-Energy Electron Diffraction......Page 275
4.6 RHEED Reflection High-Energy Electron Diffraction......Page 287
5.0 Introduction......Page 302
5.1 XPS X-Ray Photoelectron Spectroscopy......Page 305
5.2 UPS Ultraviolet Photoelectron Spectroscopy......Page 323
5.3 AES Auger Electron Spectroscopy......Page 333
5.4 REELS Reflected Electron Energy-Loss Spectroscopy......Page 347
6.0 Introduction......Page 358
6.1 XRF X-Ray Fluorescence......Page 361
6.2 TXRF Total Reflection X-Ray Fluorescence Analysis......Page 372
6.3 PIXE Particle-Induced X-Ray Emission......Page 380
7.0 Introduction......Page 394
7.1 PL Photoluminescence......Page 396
7.2 Modulation Spectroscopy......Page 408
7.3 VASE Variable Angle Spectroscopic Ellipsometry......Page 424
8.0 Introduction......Page 436
8.1 FTIR Fourier Transform Infrared Spectroscopy......Page 439
8.2 Raman Spectroscopy......Page 451
8.3 HREELS High-Resolution Electron Energy Loss Spectroscopy......Page 465
8.4 NMR Solid State Nuclear Magnetic Resonance......Page 483
9.0 Introduction......Page 496
9.1 RBS Rutherford Backscattering Spectrometry......Page 499
9.2 ERS Elastic Recoil Spectrometry......Page 511
9.3 MEIS Medium-Energy Ion Scattering Spectrometry with Channeling and Blocking......Page 525
9.4 ISS Ion Scattering Spectroscopy......Page 537
10.0 Introduction......Page 550
10.1 Dynamic SIMS Dynamic Secondary Ion Mass Spectrometry......Page 555
10.2 Static SIMS Static Secondary Ion Mass Spectrometry......Page 572
10.3 SALI Surface Analysis by Laser Ionization......Page 582
10.4 SNMS Sputtered Neutral Mass Spectrometry......Page 594
10.5 LIMS Laser Ionization Mass Spectrometry......Page 609
10.6 SSMS Spark Source Mass Spectrometry......Page 621
10.7 GDMS Glow-Discharge Mass Spectrometry......Page 632
10.8 ICPMS Inductively Coupled Plasma Mass Spectrometry......Page 647
10.9 ICP-OES Inductively Coupled Plasma-Optical Emission Spectroscopy......Page 656
11.0 Introduction......Page 668
11.1 Neutron Diffraction......Page 671
11.2 Neutron Reflectivity......Page 683
11.3 NAA Neutron Activation Analysis......Page 694
11.4 NRA Nuclear Reaction Analysis......Page 703
12.0 Introduction......Page 718
12.1 Surface Roughness Measurement, Formation by Sputtering, Impact on Depth Profiling......Page 721
12.2 Optical Scatterometry......Page 734
12.3 MOKE Magneto-Optic Kerr Rotation......Page 746
12.4 Physical and Chemical Adsorption Measurement of Solid Surface Areas......Page 759
Index......Page 768
Back Cover......Page 782