Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
Author(s): Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
Edition: 1
Year: 2004
Language: English
Pages: 439
Advanced Micro & Nanosystems Volume 1: Enabling Technology for MEMS and Nanodevices......Page 2
Contents......Page 10
Preface......Page 8
List of Contributors......Page 12
1 M3: the Third Dimension of Silicon......Page 16
2 Trends in MEMS Commercialization......Page 36
3 Capacitive Interfaces for MEMS......Page 64
4 Packaging of Advanced Micro- and Nanosystems......Page 108
5 High-frequency Integrated Microelectromechanical Resonators and Filters......Page 180
6 MEMS in Mass Storage Systems......Page 208
7 Scanning Micro- and Nanoprobes for Electrochemical Imaging......Page 252
8 Nanofluidic Modeling and Simulation......Page 304
9 Nanofluidics – Structures and Devices......Page 334
10 Carbon Nanotubes and Sensors: a Review......Page 372
11 CMOS-based DNA Sensor Arrays......Page 398
Subject Index......Page 430
