Electron Collisions with Molecules in Gases: Applications to Plasma Diagnostics and Modeling

This document was uploaded by one of our users. The uploader already confirmed that they had the permission to publish it. If you are author/publisher or own the copyright of this documents, please report to us by using this DMCA report form.

Simply click on the Download Book button.

Yes, Book downloads on Ebookily are 100% Free.

Sometimes the book is free on Amazon As well, so go ahead and hit "Search on Amazon"

Author(s): Mineo Kimura and Y. Itikawa (Eds.)
Series: Advances In Atomic, Molecular, and Optical Physics 44
Edition: 1
Publisher: Elsevier, Academic Press
Year: 2001

Language: English
Pages: 1-315
Tags: Физика;Периодика по физике;Advances in atomic, molecular, and optical physics;

Content:
Editorial Board
Page ii

Contributors
Page vii

Preface
Pages ix-xi
Mineo Kimura, Yukikazu Itikawa

Mechanisms of electron transport in electrical discharges and electron collision cross sections Original Research Article
Pages 1-32
Hiroshi Tanaka, Osamu Sueoka

Theoretical consideration of plasma-processing processes Original Research Article
Pages 33-57
Mineo Kimura

Electron collision data for plasma-processing gases Original Research Article
Pages 59-98
Loucas G. Christophorou, James K. Olthoff

Radical measurements in plasma processing Original Research Article
Pages 99-125
Toshio Goto

Radio-frequency plasma modeling for low-temperature processing Original Research Article
Pages 127-154
Toshiaki Makabe

Electron interactions with excited atoms and molecules Original Research Article
Pages 155-293
Loucas G. Christophorou, James K. Olthoff

Index
Pages 295-303

Contents of volumes in this serial
Pages 305-315