Comprehensive Microsystems, is a new 3-volume reference work on Microelectromechanical Systems (MEMS). The microsystems field has expanded to embrace a host of technologies, and microelectronics has now been joined by micro-mechanics, micro-fluidics and micro-optics to allow the fabrication of complex, multi- functional integrated microsystems. At over 2000 pages, Comprehensive Microsystems represents the authoritative primary reference source on microsystems. It addresses the need for an overview of the technologies and capabilities available in this highly interdisciplinary and dynamically-growing engineering field. Comprehensive Microsystems, provides an exhaustive overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications. Every article in the work has been commissioned by a panel of internationally recognized editors and written by an acknowledged expert in any one of a variety of disciplines. The articles provide a concise overview of a particular aspect of the microsystems field and are accompanied by extensive bibliographies, cross-referencing and indexes, enhancing the value of the text. by guiding the user to the most relevant further reading within the ever-expanding available literature. Much care has been given to avoid overlap and to provide consistency in style and contents. * The first and foremost comprehensive reference on Microelectromechanical Systems (MEMS)* Unifies established research from recognized sources in an easily accessible format* Provides an essential reference source for both academics and professionals in the field
Author(s): Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe
Edition: 1
Publisher: Elsevier Science
Year: 2007
Language: English
Pages: 1932
Cover Page......Page 1
ISBN 0444521941......Page 4
Foreword......Page 7
Preface......Page 9
Editors-in-Chief......Page 11
ACKNOWLEDGMENTS......Page 14
Contents of All Volumes......Page 18
Volume 1......Page 3
Contents of Volume 1......Page 5
Contributors to Volume 1......Page 15
1.01 Silicon and Related Materials......Page 20
1.02 Compound Semiconductors......Page 44
1.03 Metals and Alloys......Page 72
1.04 Polymers......Page 94
1.05 Biocompatibility of Microsystems......Page 126
1.06 Harsh Environment Materials......Page 150
1.07 Wet Etching......Page 202
1.08 Dry Etching......Page 236
1.09 Wafer Bonding......Page 254
1.10 Electrodeposition......Page 290
1.11 LIGA......Page 312
1.12 Low-Cost MEMS Technologies......Page 360
1.13 Micromachining......Page 398
1.14 Self-Assembly......Page 422
1.15 Packaging......Page 450
1.16 Interface Circuits......Page 484
1.17 Testing, Calibration and Compensation......Page 514
1.18 Multiphysics and Multiscale Simulation......Page 558
1.19 Systematic Synthesis Methods......Page 578
Volume 2......Page 603
Contents of Volume 2......Page 604
Contributors to Volume 2......Page 606
2.01 Electrostatic Actuation......Page 608
2.02 Magnetic Actuation......Page 646
2.03 Thermal Actuation......Page 676
2.04 Pressure Sensors......Page 708
2.05 Accelerometers......Page 742
2.06 Vibrating Gyroscopes......Page 788
2.07 Flow Sensors......Page 816
2.08 Gas Micropumps......Page 880
2.09 Liquid Micropumps......Page 908
2.10 Mixers......Page 930
2.11 Gas Sensors......Page 982
2.12 Chemical Sensors......Page 1040
2.13 Microfluidic for Lab-on-a-Chip......Page 1070
2.14 Ultrasonic Transduction......Page 1124
2.15 Tissue Engineering......Page 1148
Volume 3......Page 1191
Contents of Volume 3......Page 1192
Contributors to Volume 3......Page 1194
3.01 Micro-Mirrors......Page 1196
3.02 Diffractive and Defractive Micro-optics......Page 1260
3.03 Photonic Crystals......Page 1296
3.04 IR Imaging......Page 1308
3.05 Integrated Optics......Page 1360
3.06 Artificial Retinas......Page 1396
3.07 Optical Communications......Page 1414
3.08 Micro-Imaging Systems......Page 1462
3.09 Biophotonics......Page 1488
3.10 RF MEMS......Page 1518
3.11 Ink Jets......Page 1530
3.12 Automotive Applications......Page 1564
3.13 Environmental Monitoring......Page 1586
3.14 Medical Applications......Page 1616
3.15 Micro-Combustion......Page 1670
3.16 Micro-Coolers......Page 1694
3.17 Resonators, Oscillators, and Frequency References......Page 1746
3.18 MEMS Atomic Clocks......Page 1766
3.19 Micro-Fuel Cells......Page 1808
3.20 Molecular Machine-Based NEMS......Page 1830
A......Page 1852
B......Page 1859
C......Page 1862
D......Page 1867
E......Page 1869
F......Page 1874
G......Page 1878
H......Page 1881
I......Page 1882
K......Page 1885
L......Page 1886
M......Page 1889
N......Page 1901
O......Page 1902
P......Page 1904
R......Page 1912
S......Page 1914
T......Page 1924
U......Page 1928
V......Page 1929
W......Page 1930
Z......Page 1931
