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Advanced Metallization for Ulsi Applications in 1993: Proceedings of the Conference Held October 5-7, 1993, San Diego, California, U.S.A., and

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Author(s): Yosi Shacham-Diamand, Yasuhiro Horiike, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike, David P. Favreau, Berkeley Continuing Education in engineering University of California
Series: Materials Research Society Conference Proceedings
Publisher: Materials Research Society
Year: 1994

Language: English
Pages: 587