In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
Author(s): John F. O'Hanlon
Edition: 3
Publisher: Wiley-Interscience
Year: 2003
Language: English
Pages: 527
Tags: Приборостроение;Вакуумная техника;
Cover......Page 1
Contents......Page 8
01......Page 18
02......Page 19
03......Page 25
04......Page 41
05......Page 73
06......Page 95
07......Page 123
08......Page 124
09......Page 138
10......Page 148
11......Page 176
12......Page 196
13......Page 214
14......Page 216
15......Page 232
16......Page 244
17......Page 262
18......Page 278
19......Page 302
20......Page 326
21......Page 327
22......Page 359
23......Page 371
24......Page 391
25......Page 392
26......Page 416
27......Page 428
28......Page 444
29......Page 460
Symbols
......Page 472
Appendix 1......Page 474
Appendix 2......Page 478
Appendix 3......Page 490
Appendix 4......Page 500
Appendix 5......Page 504
Appendix 6......Page 510
Index......Page 516
