Статья. Опубликована в Изв. ВУЗов. Физика. №6, 2002. с.3-6.
Предложен метод расчета процессов упругого распыления металла в виде кластеров при ионной бомбардировке.
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Author(s): Матвеев В.И., Карпова О.В.
Language: Russian
Commentary: 500642
Tags: Физика;Физика плазмы