Thin Films: Processes and Characterization Techniques

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The book provides research scientists and engineers in industry information and data on the materials processing, characterization, and determination of materials’ physical-chemical properties. The book highlights optical and chemical properties obtained on novel materials using a range of deposition methods by two different spectroscopic techniques: SE and UV-VIS-NIR. Emphasizing applications from across a number of domains including Healthcare, Opto-Electronic, and Defense, the book is ideal for academic researchers, graduate/undergraduate students, and practicing engineers concerned with optical coating technologies.

 


Author(s): Nicoleta Nedelcu
Publisher: Springer
Year: 2023

Language: English
Pages: 128
City: Cham

Preface
Acknowledgments
Contents
Chapter 1: Types of Optical Coating Systems
1.1 Introduction
1.2 Types of Inhomogeneities for Optical Materials
1.3 Uniformity of Optical Coating
1.3.1 Determination of the Uniformity on Aspherical Surfaces in the Planetary System Geometry
1.3.2 Plane Support
1.3.2.1 Calculation Examples for the Geometric Coefficient
1.3.3 Spherical Dome
1.3.4 Pyramidal and Conical Dome
1.3.5 Planetary System Geometry
1.3.6 Uniformity Screens
References
Chapter 2: Deposition Methods, Classifications
2.1 Thin Layers Method
2.2 Thin Layer Obtaining by Thermal Evaporation Method
2.3 Thermal Evaporation by Laser Ablation
2.4 Obtaining Thin Layers by Thermal Spraying
2.4.1 Detonation Gun Spraying
2.4.2 Electric Arc Spraying Process
2.4.3 Plasma Spraying
2.5 Electrochemical Methods
2.6 Chemical Vacuum Deposition Method (CVD)
References
Chapter 3: Vacuum Deposition
3.1 Vacuum Thin Film Deposition Installations
3.2 Evaporation Devices
3.3 Important Materials for Evaporation
3.4 Thickness Measurement Methods
3.4.1 Capacitive Method
3.4.2 Inductive Method
3.4.3 Resonant Quartz Method
3.4.4 Gravimetric Method
References
Chapter 4: Morpho-structural Characterization
4.1 Methods for Characterizing Thin Layers
4.2 Structural and Morphological Analysis
4.3 Neutron Diffraction (ND)
4.4 Microscopy Techniques
4.4.1 Atomic Force Microscopy (AFM)
4.4.2 Scanning Electron Microscopy (SEM)
4.4.2.1 Energy Dispersive X-Ray Spectroscopy (EDS)
4.4.2.2 Electron Backscatter Diffraction (EBSD)
4.4.3 Transmission Electron Microscopy (TEM)
4.4.3.1 High-Resolution Transmission Electron Microscopy (HRTEM)
4.4.3.2 TEM Automated Crystallography - ACT
4.4.3.3 Selected Area Electrons Diffraction - SAED
References
Chapter 5: Optical Analysis and Chemical Properties
5.1 Study of Optical and Chemical Properties
5.1.1 UV-VIS Spectroscopy
5.2 UV-VIS-NIR and IR Spectrum Ellipsometry (SE)
5.2.1 The Effective Medium Approximation (EMA) or EMT (Effective Medium Theory)
5.2.2 Modeling Data
5.3 Study of Chemical Properties
5.3.1 Infrared Spectroscopy-IR (FT-IR)
5.3.2 Raman Spectroscopy
References
Index