Thin Film Coatings: Properties, Deposition, and Applications

Cover
Half Title
Series Page
Title Page
Copyright Page
Dedication
Table of Contents
Preface
Acknowledgements
Authors
Chapter 1 Introduction to Thin Films and Coatings
1.1 Definition of Terminology
1.1.1 What Are Thin Film Materials?
1.1.2 What Are Thick Film Materials?
1.1.3 What Are the Differences between Thin and Thicker Film Materials
1.1.4 Thin Film Depositions
1.1.5 Target, Precursors, Substrate, and Coatings
1.1.6 Why Is Thin Film Deposition and Coating Important?
1.2 History and Early Uses of Thin Films
1.3 Classification of Thin Film Deposition Methods
1.4 Mechanism of Thin Film Growth
1.4.1 Frank–Van der Merwe Growth
1.4.2 Stranski–Krastanov Growth (Layer-Plus–Island)
1.4.3 Volmer–Weber (Isolated Island) Growth Mode
1.5 Parameters Influencing Thin Film Depositions
1.6 Properties of Thin Film Materials
1.7 Modern Applications of Thin Film Materials
1.8 Summary
1.9 Scope of the Book
References
Chapter 2 Methods of Thin Film Deposition
2.1 Introduction
2.2 Physical Vapour Deposition
2.2.1 Sputtering
2.2.1.1 Direct Current (DC) and Radiofrequency (RF) Sputtering
2.2.1.2 Magnetron Sputtering
2.2.1.3 High Power Impulse Magnetron Sputtering (HIPIMS)
2.2.1.4 Reactive Sputtering
2.2.1.5 Bias Sputtering
2.2.1.6 Equipment
2.2.2 Thermal Evaporation
2.2.2.1 Equipment
2.2.3 Ion Plating
2.2.4 Electron Beam Deposition
2.2.5 Pulsed Laser Deposition
2.2.6 Thermal Spray
2.2.6.1 Flame Spray
2.2.6.2 Plasma Spray Deposition Technique
2.2.6.3 High Velocity Oxy-Fuels
2.3 CVD Techniques
2.3.1 Science of CVD
2.3.1.1 Steps in CVD
2.3.1.2 Advantages of CVD Methods in Preparation of Thin Film Technologies
2.3.2 Atmospheric Pressure CVD
2.3.2.1 Reactors in APCVD
2.3.2.2 Advantages of APCVD
2.3.2.3 Limitations of APCVD
2.3.2.4 APCVD Parameters
2.3.3 Low Pressure Chemical Vapour Deposition
2.3.3.1 Reactors Used in LPCVD
2.3.4 Ultrahigh Vacuum CVD
2.3.4.1 Operating Principles
2.3.5 Plasma Enhanced Chemical Vapour Deposition (PECVD)
2.3.5.1 Advantages of PECVD
2.3.5.2 Disadvantages of PECVD
2.3.5.3 Applications
2.3.5.4 Parameters in PECVD
2.3.6 Sub-Atmospheric Pressure Chemical Vapour Deposition
2.4 Atomic Layer Deposition
2.4.1 Introduction
2.4.2 Principle of Atomic Layer Deposition
2.4.3 Thermal ALD
2.4.4 Plasma Assisted Atomic Layer Deposition
2.4.5 Photo-Assisted ALD
2.4.6 Metal ALD
2.4.7 Catalytic SiO[sub(2)] ALD
2.4.8 Attributes/Advantages of ALD Process
2.4.9 Precursors and Materials for ALD
2.4.10 Applications of ALD
2.4.10.1 Applications in Microelectronics
2.4.10.2 Application in the Medical Field
2.4.10.3 Applications in Photovoltaics (PV)/ Solar Cells
2.4.10.4 Application in Energy Storage Systems
2.4.10.5 Application in Desalination
2.4.10.6 Application in Catalysis
2.4.10.7 Application in Optics
2.5 Some Chemical Deposition Methods
2.5.1 Sol-Gel Technique
2.5.2 Electro-Deposition
2.5.3 Chemical Bath Deposition
2.6 Summary
References
Chapter 3 Characterisation Techniques of Thin Films
3.1 Classification of Characterisation Techniques
3.2 Structure Characterisation
3.2.1 Morphology of Thin Films
3.2.2 Grain Size and Crystal Analyses
3.2.3 Thin Film Defects
3.2.3.1 Surface Pre-treatments of Substrate
3.2.3.2 Thin Film Defects Formed during Deposition Processes
3.3 Topography Characterisation
3.4 Fractal Theory in Thin Films
3.5 Mechanical Characterisation
3.5.1 Nanoindentation Tests
3.5.2 Wear/Scratch Tests
3.6 Chemical Characterisation
3.6.1 Chemical Composition
3.6.2 Corrosion Characterisation
3.7 Summary of Characterisation Methods
3.8 Summary
References
Chapter 4 Hybrid and Scalable Thin Films
4.1 Introduction
4.1.1 What Is a Hybrid Material?
4.1.2 What Is a Hybrid Thin Film Material?
4.1.3 What Is a Multilayer Thin Film?
4.2 Properties of Thin Hybrid and Multilayer Thin Films
4.3 Free-Standing and Scalable Thin Films
4.4 Summary
References
Chapter 5 Bibliometric Analysis of Applications of Thin Film Materials
5.1 Introduction
5.2 Bibliometric Analyses on Thin Film Applications
5.2.1 Growth Trend over the Years
5.2.2 Thin Film Research by Country
5.2.3 Applications of Thin Film Materials
5.3 Summary
References
Chapter 6 Thin Films for Biomedical Applications
6.1 Introduction to Biomaterials
6.1.1 Metal and Metal Alloy Biomaterials
6.1.2 Ceramics Biomaterials
6.1.3 Biopolymers
6.1.4 Composite Biomaterials
6.2 Thin Film Materials and Their Applications in Biomaterials
6.3 Specific Applications of Thin Films in the Biomedical Sector
6.3.1 Hip Replacement
6.3.2 Knee and Shoulder Prosthesis
6.3.3 Neural/Brain Implants
6.3.4 Protein Repellent Coatings
6.4 Emerging Trends on the Application of Thin Film Materials in Biomedical Field
6.4.1 Self- Healing Biomaterial Coatings
6.4.2 Development of Hybrid Biomaterial Thin Films
6.5 Summary
References
Chapter 7 Thin Films for Surface Protection
7.1 Introduction to Surface Protection
7.2 Thin Film Materials in Wear Protection
7.3 Hydrophobic and Hydrophilic Thin Materials
7.4 Thin Film Materials for Corrosion Protection
7.4.1 Aluminium Oxide
7.4.2 Titanium Oxide
7.4.3 Aluminium Oxide–Titanium Oxide
7.4.4 Tantalum Oxide (Ta[sub(2)] O[sub(5)] )
7.4.5 Titanium Nitride
7.5 Trend and Progress of Thin Film Technology in Surface Protection Industry
7.6 Summary
References
Chapter 8 Thin Films for Cutting Tools
8.1 Introduction to High-Speed Machining
8.2 Application of HSM
8.2.1 Aerospace Applications
8.2.2 Die and Mould Manufacturing
8.2.3 Automotive and Other Manufacturing Industries
8.3 Advantages and Disadvantage of HSM
8.3.1 Disadvantages of HSM
8.4 HSM Tools Materials
8.5 HSM Methods and Their Applications
8.6 Importance of Coating Cutting Tools for Machining Processes
8.7 Coating of Cutting Tools for HSM
8.7.1 Classification of Coating Materials Used in Cutting Tools
8.7.2 Nitrides
8.7.2.1 Titanium Nitride (TiN)
8.7.2.2 Titanium Aluminium Nitride (TiAlN)
8.7.2.3 Chromium Nitride (CrN)
8.7.2.4 Titanium Chromium Nitride (TiCrN) Coating
8.7.2.5 Zirconium Nitride
8.7.2.6 Titanium Silicium Nitride
8.7.2.7 Titanium Aluminium Silicon Nitride (TiAlSiN)
8.7.2.8 Chromium Aluminium Nitride (CrAlN)
8.7.2.9 Titanium Molybdenum Nitride (TiMoN)
8.7.2.10 Boron Nitride (BN)
8.7.3 Carbides
8.7.3.1 Titanium Carbide (TiC)
8.7.3.2 Chromium Carbide (CrC)
8.7.3.3 Tungsten Carbide (WC)
8.7.4 Others
8.7.4.1 Titanium Boride (TiB[sub(2)])
8.7.4.2 Diamond Carbon
8.7.4.3 Molybdenum Disulphide (MoS[sub(2)] )
8.7.4.4 Aluminium Oxide
8.8 Progress in Thin Film Materials for Cutting Tool Industry
8.9 Summary
References
Chapter 9 Thin Films for Electronic, Spintronics, and Optical Applications
9.1 Introduction
9.2 Importance of Optics and Spintronic Technologies
9.3 Thin Film Materials for Optic Devices
9.3.1 Oxide-Based Ceramic Coatings
9.3.2 Non-Oxide Ceramic Coatings
9.3.3 Metal-Based Thin Films
9.4 Thin Film Materials for Spintronic and Photonic Applications
9.5 Thin Film Materials for Microelectronic Applications
9.6 Thin Film Materials for Nanodevices and Flexible Gadgets
9.7 Future Outlook
9.8 Summary
References
Chapter 10 Thin Film Materials for Energy Applications
10.1 Energy Materials and Renewable Energy Devices
10.1.1 Introduction
10.1.2 Solar Cells and Photovoltaic Materials
10.1.3 Fuel Cells
10.1.4 Wind Turbines
10.1.5 Nuclear Reactors
10.2 Thin Film Materials for Solar Cell Device Applications
10.2.1 Introduction
10.2.2 Copper Indium Selenide/Copper Gallium Selenide
10.2.3 Cadmium Telluride Thin Films
10.2.4 Amorphous Silicon (a-Si)
10.2.5 Dye Sensitised Solar Cell
10.2.6 Perovskite Solar Cells
10.3 Thin Film Materials for Nuclear Applications
10.3.1 Introduction
10.3.2 Detectors
10.3.3 Cladding
10.3.4 Insulators
10.4 Application of Thin Films for Fuel Cells
10.4.1 Introduction
10.4.2 Low Temperature Fuel Cells
10.5 Thin Film Materials for Wind and Hydro-Power Systems
10.5.1 Wind-Power System
10.5.2 Hydro-Power System
10.6 Emerging Technologies in Thin Films for Energy Materials
10.7 Summary
References
Chapter 11 Smart and Self-Healing Thin Film Materials
11.1 Self-Healing Materials
11.2 Smart Thin Film Materials
11.3 Self-Healing Thin Film Materials and Applications
11.4 Smart Thin Film Materials and Their Applications
11.5 The Future of Smart and Self-Healing Thin Film Materials
11.6 Summary
References
Chapter 12 Thin Films for Antimicrobial Applications
12.1 Introduction
12.2 Brief Description of Microbial Characteristics
12.3 Importance of Antimicrobial Materials in Today’s Society
12.4 Thin Film Materials for Antimicrobial Applications
12.4.1 Silver Thin Film Coatings
12.4.2 TiO[sub(2)] Thin Film Coatings
2 12.4.3 Chitin/Chitosan-Based Thin Films
12.4.4 Starch Hybrid Thin Film
12.5 The Future of Thin Film Materials for Antimicrobial Applications
12.6 Summary
References
Chapter 13 High Entropy Alloy Thin Films
13.1 Introduction to High Entropy Alloys
13.2 Importance of HEAs in the Modern Industry
13.3 High Entropy Alloys and Thin Films
13.3.1 AlCoCrCuFeNi
13.3.2 AlCoCrFeNi
13.3.3 AlCoCrCuFeNiTi[sub(x)] and AlCoCrFeNiTi[sub(x)]
13.3.4 AlCrFeNiMn
13.3.5 AlCoCrFeNiMo[sub(x)] and AlCoCrCuFeNiMo[sub(x)]
13.3.6 AlCoCrFeNiNb[sub(x)]
13.3.7 AlCoCrFeNiSi[sub(x)]
13.3.8 Al[sub(x)] (TiVCrMnFeCoNiCu)[sub(100-x)]
13.3.9 TiNbMoMnFe
13.3.10 CoCrFeNiZr[sub(x)]
13.3.11 NbMoTaW
13.3.12 TiTaHfNbZr
13.3.13 CuMoTaWV
13.3.14 NbSiTaTiZr
13.3.15 Other HEA Thin Films
13.4 Future Application and Development of Thin Film HEAs
13.4.1 Transport and Energy Sectors
13.4.2 Gas Turbines, Rocket Nozzles, and Nuclear Plant Construction
13.4.3 Protective Coatings
13.4.4 Biomedical Applications
13.5 Summary
References
Chapter 14 Thin Film Technology and Industry 4.0
14.1 The Industry 4.0
14.2 Industry 4.0 and Thin Film Industry
14.3 Role/Future of Thin Film Technology in Industry 4.0
14.4 Summary
References
Chapter 15 Thin Films and 3D Printing Technology
15.1 Introduction to 3D Printing Technology
15.2 3D Printing and Thin Film Technology
15.2.1 Surface Engineering of AM Parts
15.2.2 Complex Structures and Patterned Thin Film Materials
15.2.3 Preparation of Flexible Substrates
15.3 Summary
References
Index