This book covers key topics in the emerging field of plasmonic MEMS, with an emphasis on practical aspects. Although readers can find many comprehensive textbooks on electromagnetic waves, nanophotonics and plasmonics, most of these lack the focus needed for a thorough grasp of plasmonic micromachining and MEMS.
This book introduces the main framework of plasmonic MEMS, providing an overview of introductory concepts, a thorough description of the basic foundations, along with the state-of-the-art and existing challenges. The author presents an abbreviated overview of the basic physics and devices related to electromagnetic waves and surface plasmons. Additional coverage includes recent advances in the fabrication of sub-100-nm patterns on micro scale devices and structures and a review of emerging techniques in the fabrication of plasmonic systems. A comprehensive and historical review of the current advances in the area of plasmonic nanofabrication is also included.This book focuses on an appealing and distinctive aspect of plasmonics, as a tool for patterning and the fabrication of ultra-fine resolution structures. The author reviews the recent developments in plasmonic MEMS and microsystems for biosensing applications, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic for near-field scanning optical microscopy (NSOM) and plasmonics on-chip system for cellular imaging.
Author(s): John X. J. Zhang
Series: Synthesis Lectures on Materials and Optics
Publisher: Springer
Year: 2023
Language: English
Pages: 195
City: Cham
Preface
Contents
1 Introduction
1.1 MEMS and Optical MEMS
1.2 Plasmonic MEMS: A Frontier of Photonic Devices
1.3 Status of the Field
1.4 Existing Challenges
References
2 Theoretical Foundations
2.1 Maxwell’s Equations and Electromagnetic Wave Theory
2.2 Diffraction and Interference
2.3 Transmission Line Theory (TLT)
2.4 Plasmonic Nanograting Theory
2.5 Numerical Methods
References
3 Fabrication Techniques
3.1 Nanofabrication Using Photons
3.1.1 Photolithography
3.1.2 Electron Beam Lithography
3.1.3 Focused-Ion Beam Lithography
3.1.4 Scanning Probe Lithography
3.2 Emerging Techniques
3.2.1 Nanoimprint Lithography
3.2.2 Soft Lithography
3.2.3 Nanosphere Lithography
3.2.4 Nanofabrication by Self-assembly
References
4 Plasmonics as a Fabrication Tool
4.1 Prism-Coupled Plasmonic Nanolithography
4.2 Grating-Coupled Plasmonic Nanolithography
4.3 Focused Plasmonic Nanolithography
References
5 Plasmonic MEMS in Biosensing and Imaging
5.1 Refractive-Index Based Label-Free Biosensing
5.2 Plasmonic Near-Field Scanning Optical Microscopy
5.3 Plasmonic Nanosensors for Point-Of-Care (POC) Biomarker Screening
5.4 Signal Read-Out Method
5.4.1 Colorimetric
5.4.2 Fluorescence, Raman, and Handheld-Format Systems
5.5 Nanoparticle Based Designs
5.5.1 Sphere
5.5.2 Cube
5.5.3 Spike/Star
5.6 Sandwich-, Chip-, and Paper-Based Designs
5.6.1 Sandwich Structure
5.6.2 Microfluidic Chip
5.6.3 Paper Based Design
5.7 Meta-Surface Patterned Design
5.7.1 Lithographic Patterning
5.7.2 Nanoisland Films
5.7.3 Chemical Growth
5.8 Challenges and Perspectives
5.8.1 Covid-19 Testing
5.8.2 Machine Learning
5.8.3 Miniaturization
5.8.4 Gold Standard
References
Summary and Future Perspectives
Appendix 1
