Molecular Layer Deposition for Tailored Organic Thin-Film Materials

Cover
Half Title
Series Page
Title Page
Copyright Page
Dedication
Table of Contents
Preface
Author
Chapter 1 Introduction
Chapter 2 Examples of Inorganic Tailored Materials
2.1 Classification of Thin-Film Growth Methods
2.2 Wavefunction Control in Quantum Corrals by Scanning Tunneling Microscope
2.3 Wavefunction Control in Photonic/Electronic Devices by Molecular Beam Epitaxy
2.4 Amorphous Superlattices Fabricated by Plasma Chemical Vapor Deposition
2.4.1 Transfer Doping in a-SiN[sub(x)]:H/a-Si:H Amorphous Superlattices
2.4.2 Influence of a-SiN[sub(x)]:H Gate Insulator Composition on Thin-Film Transistor Performance
2.5 Wavefunction Control in Electrochromic Thin Films by Sputtering
References
Chapter 3 Molecular Layer Deposition (MLD)
3.1 Atomic Layer Deposition and Molecular Layer Deposition
3.1.1 Atomic Layer Deposition
3.1.1.1 Concept of Atomic Layer Deposition
3.1.1.2 Optoelectronic Materials and Devices Expected to be Realized by ALD
3.1.2 Beginning of MLD
3.2 Concept of MLD
3.2.1 Basic Concept of MLD
3.2.1.1 MLD Utilizing Chemical Reaction
3.2.1.2 MLD Utilizing Electrostatic Force
3.2.2 Variations of MLD
3.2.2.1 MLD Involving Steps for Side Molecule Attachment and Cross-Linking
3.2.2.2 MLD Utilizing Molecule Groups
3.2.2.3 Both-Side and Branching Wire Growth
3.3 MLD Equipment
3.3.1 Vapor-Phase MLD
3.3.1.1 K-Cell-Type MLD
3.3.1.2 Carrier-Gas-Type MLD
3.3.2 Liquid-Phase MLD
3.3.3 MLD Utilizing Gas-Flow Circuits and Fluidic Circuits
3.4 Growth Mechanisms of MLD
3.4.1 Growth Rates
3.4.2 MLD Windows
3.5 Proof of Concepts of Monomolecular-Step Growth in MLD
3.5.1 Polymer Wires Grown by MLD Utilizing Chemical Reaction
3.5.1.1 Polyamic Acid Made from PMDA/DNB
3.5.1.2 Polyimide Made from PMDA/DDE
3.5.1.3 Conjugated Polymers
3.5.2 Molecular Stacked Structures Grown by MLD Utilizing Electrostatic Force
3.5.2.1 Stacked Structures of p-Type and n-Type Dye Molecules on ZnO Surfaces
3.5.2.2 Dye Adsorption Strength
3.5.2.3 LP-MLD with p-Type and n-Type Dye Source Molecules
3.5.2.4 LP-MLD Utilizing Molecule Groups
3.5.2.5 Monomolecular-Step Growth of Charge-Transfer Complexes
3.6 High-Rate MLD
3.6.1 Influence of Molecular Gas Flow on Polymer Film Growth
3.6.2 Domain-Isolated MLD
References
Chapter 4 Selective MLD
4.1 Classification of Selective Growth
4.2 Area-Selective Growth on Hydrophilic/Hydrophobic Surfaces
4.2.1 Concept
4.2.2 Area-Selective Growth of Poly-AM on SiO/Hexamethyl-Disilazane (HMDS) Surfaces
4.2.3 Area-Selective Growth of Poly-AM on SiO[sub(2)]/Triphenyldiamine (TPD) Surfaces
4.2.4 Area-Selective MLD of Polymer MQDs on TiO[sub(2)]/ZnO Surfaces
4.3 Horizontally-Aligned Selective Growth on Anisotropic Atomic-Scale Structures
4.3.1 All-Dry Process for Polymer Wire Alignment
4.3.2 Poly-AM on Obliquely-Evaporated SiO[sub(2)] Underlayers
4.3.3 Poly-AM on Obliquely-Evaporated SiO Underlayers
4.3.4 Polyimide on Obliquely-Evaporated SiO[sub(2)] Underlayers
4.4 Electric-Field-Assisted Selective Growth
4.4.1 Concept
4.4.2 Polyamic Acid
4.5 Vertically-Aligned Selective Growth from Seed Cores
4.5.1 Vertically-Aligned Selective MLD from Seed Cores with Self-Assembled Monolayers (SAMs)
4.5.1.1 Surface-Active Materials for Seed Cores
4.5.1.2 Vertically-Aligned Selective MLD of Poly-AM from SAMs
4.5.1.3 Carrier-Gas-Type Organic CVD of Poly-AM from SAMs
4.5.2 Monomolecular-Step Polymer Wire Growth from SAMs
4.6 Improved Area-Selective Resolution
References
Chapter 5 Expected Impacts of MLD on Photonics/Electronics Field
5.1 Featured Capabilities of MLD
5.2 Photonic/Electronic Devices Realized by MLD
5.2.1 Advanced Photonic/Electronic Devices
5.2.2 MLD Processes for Advanced Photonic/Electronic Devices
5.2.2.1 Devices with Conjugated Polymer Wires Containing Donors/Acceptors
5.2.2.2 Area-/Orientation-Controlled Selective MLD for Devices with Conjugated Polymer Wires
5.3 Photonic/Electronic Molecular Nanosystems Fabricated by MLD
5.4 Molecular Nanoduplication (MND)
References
Chapter 6 Polymer Multiple Quantum Dots (MQDs) Fabricated by MLD
6.1 Quantum Dots
6.2 Polymer MQDs and Molecular MQDs
6.3 Polymer MQDs Fabricated by VDP
6.4 Polymer MQDs Fabricated by MLD with Three Kinds of Source Molecules
6.4.1 Structures of Polymer MQDs
6.4.2 Carrier-Gas-Type MLD for Polymer MQD Fabrication
6.4.3 Quantum Confinement of Electrons in Polymer MQDs
6.4.4 Polymer MQDs Containing Different-Length Quantum Dots in a Single Wire
6.4.5 Explanation of Quantum Confinement Effects Based on Configurational Coordinate Diagrams
References
Chapter 7 Theoretically-Predicted Electro-Optic (EO) Effect in Polymer MQDs
7.1 Nonlinear Optical Phenomena
7.2 Procedures for Calculation of EO Effects by Molecular Orbital Method
7.3 Guidelines to Enhance Optical Nonlinearity by Controlling Electron Wavefunctions
7.4 Enhancement of Pockels Effect in Polydiacetylene Backbones
7.4.1 Influence of Wavefunction Shapes
7.4.2 Influence of Wavefunction Dimensionality
7.4.3 Influence of Sharpening Absorption Bands
7.4.4 Control of Energy Gaps
7.4.5 EO Polymer MQDs
7.5 Enhancement of Pockels Effect in Polyazomethine Backbones
7.6 Enhancement of Kerr Effect
References
Chapter 8 Organic EO Materials
8.1 Comparison of EO Materials
8.2 Molecular Crystals
8.2.1 AC Modulation Method
8.2.2 Pockels Effect in Styrylpyridinium Cyanine Dye (SPCD)
8.2.3 Pockels Effect in Methyl-4-Nitroaniline (MNA)
8.3 Poled Polymers
8.3.1 EO Poled Polymers
8.3.2 Pockels Effect in Side-Chain Polyimide
8.3.3 Optical Switches Utilizing EO Poled Polymers
8.4 EO Waveguides Fabricated by Selective Growth
8.4.1 EO Waveguides by Electric-Field-Assisted Selective Growth
8.4.2 Conjugated Polymer Waveguides by Horizontally-Aligned Selective Growth
8.5 Acceptor Substitution into Conjugated Polymer Wires
References
Chapter 9 Integrated Light Modulators and Optical Switches
9.1 Classification of Light Modulators and Optical Switches
9.2 Waveguide Prism Deflector (WPD) Optical Switches
9.3 WPD Optical Switches Utilizing Pockels Effect
9.3.1 Models and Simulation Procedures
9.3.2 Predicted Performance
9.4 WPD Optical Switches Utilizing Kerr Effect
9.4.1 Models and Simulation Procedures
9.4.2 Predicted Performance
9.5 Impacts of Polymer MQDs on Light Modulator/Optical Switch Performance
9.6 Advanced WPD Optical Switches
9.6.1 WPD Optical Switches with ADD Functions
9.6.2 WPD Optical Switches with MUX/DEMUX Functions
9.7 Nanoscale Optical Switches
9.8 Heterogeneous Integration of Light Modulators/Optical Switches
References
Chapter 10 Self-Organized Lightwave Network (SOLNET)
10.1 Concept of SOLNET
10.1.1 Types of SOLNET
10.1.2 PRI Material
10.1.3 One-Photon and Two-Photon SOLNETs
10.1.4 Fabrication Processes of Luminescent Targets
10.2 Predicted Performance of SOLNETs
10.2.1 Models and Simulation Procedures
10.2.2 Predicted Performance
10.3 Experimental Demonstrations of SOLNETs
10.3.1 One-Photon SOLNETs
10.3.2 Two-Photon SOLNETs
References
Chapter 11 Integrated Optical Interconnects and Optical Switching Systems
11.1 Intra-Box Optical Interconnects
11.2 3-D Optoelectronic (OE) Platforms Based on Scalable Film Optical Link Modules (S-FOLMs)
11.3 Self-Organized 3-D Integrated Optical Interconnects within Boxes of Computers
11.3.1 Concept
11.3.2 Impacts of Polymer MQDs
11.4 Self-Organized 3-D Micro-Optical Switching Systems (3D-MOSSs)
11.4.1 Concept
11.4.2 Impacts of Polymer MQDs
References
Chapter 12 Solar Energy Conversion Systems
12.1 Waveguide-Type Thin-Film Photovoltaic (WTP) Devices with Organic-MQD Sensitization
12.1.1 Classification of WTP Devices
12.1.2 Organic-MQD Sensitization
12.1.3 Organic-MQD Sensitization with Multi-Step Excitation
12.2 Proof of Concept of Organic-MQD Sensitization for WTP Devices
12.2.1 Two-Dye Sensitization by p/n-Dye-Stacked Structures
12.2.2 Molecular-MQD Sensitization in Guided Light Configuration Utilizing LP-MLD
12.2.3 Polymer-MQD Sensitization in Guided Light Configuration Utilizing MLD
12.2.4 Three-Dye Molecular-MQD Sensitization Utilizing LP-MLD
12.3 Film-Based Integrated Solar Energy Conversion Systems
12.4 Thin-Film Artificial Photosynthesis Devices
12.5 Additional Proposals Related to Energy and Molecular Sensing
References
Chapter 13 Expected Applications of LP-MLD to Cancer Therapy
13.1 MLD in Human Bodies
13.2 Molecular Targeted Drug Delivery by In-Situ Synthesis in Cancer Cells Utilizing LP-MLD
13.2.1 General Concept
13.2.2 Low-Molecular-Weight Drug Delivery into Cancer Cells
13.2.3 Antibody Drug Delivery to Cancer Cells
13.2.4 Drug Delivery into Cancer Stem Cells
13.3 Photo-Assisted Cancer Therapy
13.3.1 SOLNET-Assisted Laser Surgery
13.3.2 Two-Photon and SOLNET-Assisted Photodynamic Therapy (PDT)
References
Chapter 14 Review of Forefront Research on MLD
14.1 Materials Grown by MLD
14.2 Classification of MLD
14.3 Concerns and Solutions in MLD
14.3.1 Double Reaction and Uptake of Molecules
14.3.2 Limited Choice of Precursors
14.4 Features and Application Fields of MLD
14.5 Tailored Materials Grown by MLD
14.5.1 Resists for Lithography
14.5.2 Diffusion Barriers
14.5.3 Insulators
14.5.4 Semiconductors
14.6 Tailored Materials Grown by MLD Combined with ALD
14.6.1 Diffusion Barriers
14.6.2 Insulators
14.6.3 Semiconductors
14.6.4 Conductors
14.7 Pore-Size-Controlled Organic – Inorganic Hybrid Materials Grown by MLD
14.7.1 Batteries
14.7.2 Gas Separation/Water Purification
14.8 Pore-Size-Controlled Metal Oxide Materials Prepared Utilizing MLD
14.8.1 Catalysis Stabilization, Gas Separation/Water Purification, and Dry Reforming
14.8.2 Photocatalysis
14.9 Other Applications
References
Appendix I: Additional MLD Processes
Appendix II: Analogy between Photons and Electrons
Epilogue
Index