Hybrid Micromachining and Microfabrication Technologies: Principles, Varieties and Applications

Cover
Title Page
Copyright Page
Contents
Preface
Acknowledgement
Chapter 1 Overview of Hybrid Micromachining and Microfabrication Techniques
1.1 Introduction
1.2 Classification of Hybrid Micromachining and Microfabrication Techniques
1.2.1 Compound Processes
1.2.2 Methods Aided by Various Energy Sources
1.2.3 Processing Using a Hybrid Tool
1.3 Challenges in Hybrid Micromachining
1.4 Conclusions
1.5 Future Research Opportunities
References
Chapter 2 A Review on Experimental Studies in Electrochemical Discharge Machining
2.1 Introduction
2.2 Historical Background
2.3 Principle of Electrochemical Discharge Machining Process
2.4 Basic Mechanism of Electrochemical Discharge Machining Process
2.5 Application of ECDM Process
2.6 Literature Review on ECDM
2.6.1 Literature Review on Theoretical Modeling
2.6.2 Literature Review on Internal Behavioral Studies
2.6.3 Literature Review on Design of ECDM
2.6.4 Literature Review on Workpiece Materials Used in ECDM
2.6.5 Literature Review on Tooling Materials and Its Design in ECDM
2.6.6 Literature Review on Electrolyte Chemicals Used in ECDM
2.6.7 Literature Review on Optimization Techniques Used in ECDM
2.7 Conclusion
Acknowledgments
References
Chapter 3 Laser-Assisted Micromilling
3.1 Introduction
3.2 Laser-Assisted Micromilling
3.2.1 Laser-Assisted Micromilling of Steel Alloys
3.2.2 Laser-Assisted Micromilling of Titanium Alloys
3.2.3 Laser-Assisted Micromilling of Ni Alloys
3.2.4 Laser-Assisted Micromilling of Cementite Carbide
3.2.5 Laser-Assisted Micromilling of Ceramics
3.3 Conclusion
References
Chapter 4 Ultrasonic-Assisted Electrochemical Micromachining
4.1 Introduction
4.2 Ultrasonic Effect
4.2.1 Pumping Effect
4.2.2 Cavitation Effect
4.3 Experimental Procedure
4.4 Results and Discussion
4.4.1 Effect of Traditional Electrochemical Micromachining
4.4.2 Effect of Electrolyte Jet During Micropatterning
4.4.3 Effect of Ultrasonic Assistance During Micropatterning
4.4.4 Effect of Ultrasonic Amplitude During Micropatterning
4.4.5 Influence of Working Voltage During Micropatterning
4.4.6 Influence of Pulse-Off Time During Micropatterning
4.4.7 Influence of Electrode Feed Rate During Micropatterning
4.5 Conclusions
References
Chapter 5 Micro-Electrochemical Piercing on SS 204
5.1 Introduction
5.2 Experimentation on SS 204 Plates With Cu Tool Electrodes
5.3 Results and Discussions
5.4 Conclusions
References
Chapter 6 Laser-Assisted Electrochemical Discharge Micromachining
6.1 Introduction
6.2 Experimental Procedure
6.3 Results and Discussion
6.3.1 ECDM Pre-Process
6.3.2 Laser Pre-Process
6.4 Conclusions
References
Chapter 7 Laser-Assisted Hybrid Micromachining Processes and Its Applications
7.1 Introduction
7.2 Laser-Assisted Hybrid Micromachining
7.3 Laser-Assisted Traditional-HMMPs
7.3.1 Laser-Assisted Microturning Process
7.3.2 Laser-Assisted Microdrilling Process
7.3.3 Laser-Assisted Micromilling Process
7.3.4 Laser-Assisted Microgrinding Process
7.4 Laser-Assisted Nontraditional HMMPs
7.4.1 Laser-Assisted Electrodischarge Micromachining
7.4.2 Laser-Assisted Electrochemical Micromachining
7.4.3 Laser-Assisted Electrochemical Spark Micromachining
7.4.4 Laser-Assisted Water Jet Micromachining
7.5 Capabilities and Shortfalls of LA-HMMPs
7.6 Conclusion
Acknowledgment
References
Chapter 8 Hybrid Laser-Assisted Jet Electrochemical Micromachining Process
8.1 Introduction
8.2 Overview of Electrochemical Machining
8.3 Importance of Electrochemical Micromachining
8.4 Fundamentals of Electrochemical Micromachining
8.4.1 Electrochemistry of Electrochemical Micromachining
8.4.2 Mechanism of Material Removal
8.5 Major Factors of EMM
8.5.1 Nature of Power Supply
8.5.2 Interelectrode Gap (IEG)
8.5.3 Temperature, Concentration, and Electrolyte Flow
8.6 Jet Electrochemical Micromachining
8.7 Laser as Assisting Process
8.8 Laser-Assisted Jet Electrochemical Micromachining (LA-JECM)
8.8.1 Working Principles of LAJECM
8.8.2 Mechanism of Material Removal
8.8.3 Materials
8.8.4 Theoretical and Experimental Method for Process Energy Distribution
8.8.5 LAJECM Process Temperature
8.8.6 Material Removal Rate and Taper Angle
8.8.7 LAJECM and JECM Comparison
8.8.8 Machining Precision
8.8.8.1 Geometry Precision
8.8.8.2 Profile Surface Roughness
8.9 Applications of LAJECM
References
Chapter 9 Ultrasonic Vibration-Assisted Microwire Electrochemical Discharge Machining
9.1 Introduction
9.2 Experimental Setup
9.3 Results and Discussion
9.3.1 Influence of Ultrasonic Amplitude on Micro Slit Width
9.3.2 Influence of Voltage on Micro Slit Width
9.3.3 Effect of Duty Ratio on Micro Slit Width
9.3.4 Influence of Frequency on Slit Width
9.3.5 Analysis of Micro Slits
9.4 Conclusions
References
Chapter 10 Study of Soda-Lime Glass Machinability by Gunmetal Tool in Electrochemical Discharge Machining and Process Parameters Optimization Using Grey Relational Analysis
10.1 Introduction
10.2 Experimental Conditions
10.3 Analysis of Average MRR of Workpiece (Soda-Lime Glass) Through Gunmetal Electrode
10.3.1 ANOVA for Average MRR
10.3.2 Influence of Input Factors on Average MRR
10.4 Analysis of Average Depth of Machined Hole on Soda-Lime Glass Through Gunmetal Electrode
10.4.1 ANOVA for Average Machined Depth
10.4.2 Influence of Input Factors on Average Machined Depth
10.5 Analysis of Average Diameter of Hole of Soda-Lime Glass Through Gunmetal Electrode
10.5.1 ANOVA for Average Hole Diameter
10.5.2 Influence of Input Factors on Average Hole Diameter
10.6 Grey Relational Analysis Optimization of Soda-Lime Glass Results by Gunmetal Electrode
10.6.1 Methodology of Grey Relational Analysis
10.6.2 Data Pre-Processing
10.6.3 Grey Relational Generating
10.6.4 Deviation Sequence
10.6.5 Grey Relational Coefficient
10.6.6 Grey Relational Grade
10.7 Conclusion
Acknowledgments
References
Chapter 11 Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit
11.1 Introduction
11.2 Concept
11.3 Fabrication Technology
11.3.1 Microfabrication Technology of Silicon Material
11.3.2 Multilayer Ceramic Technology
11.4 Designs and Experiments
11.4.1 Designs of Turbine and Magnetic Circuit for Single-Phase Type
11.4.2 Designs of Turbine and Magnetic Circuit for Three-Phase Type
11.4.3 Rotational Experiment and Rotor Blade Design
11.4.4 Low Boiling Point Fluid and Experiment
11.5 Results and Discussion
11.5.1 Fabricated Evaluation
11.5.2 Rotational Result
11.5.3 Comparison of Rotor Shape and Rotational Motion
11.5.4 Phase Change
11.6 Conclusions
Acknowledgment
References
Chapter 12 A Review on Hybrid Micromachining Process and Technologies
12.1 Introduction
12.2 Characteristics of Hybrid-Micromachining
12.3 Bibliometric Survey of Micromachining to Hybrid-Micromachining
12.4 Material Removal in Microsizes
12.5 Nontraditional Hybrid-Micromachining Technologies
12.6 Classification of Techniques Used for Micromachining to Hybrid-Micromachining
12.6.1 Classification According to Material Removal Hybrid-Micromachining Phenomena
12.6.2 Classification According to Categories Based on Material Removal Accuracy
12.6.3 Classification According to Hybrid-Micromachining Purposes
12.6.4 Classification of Hybrid Micromanufacturing Processes
12.7 Materials Are Used and Application of Hybrid-Micromachining
12.8 Conclusions
References
Chapter 13 Material Removal in Spark-Assisted Chemical Engraving for Micromachining
13.1 Introduction
13.2 Essentials of SACE
13.2.1 Instances of SACE Micromachining
13.3 Genesis of SACE Acronym: A Brief Historical Survey
13.4 SACE: A Viable Micromachining Technology
13.4.1 Mechanical μ-Machining Techniques
13.4.2 Chemical μ-Machining Methods
13.4.3 Thermal μ-Machining Methods
13.5 Material Removal Mechanism in SACE μ-Machining
13.5.1 General Aspects
13.5.2 Micromachining at Shallow Depths
13.5.3 Micromachining at High Depths
13.5.4 Micromachining by Chemical Reaction
13.6 SACE μ-Machining Process Control
13.6.1 Analysis of Process
13.6.2 Etch Promotion
13.7 Conclusion and Scope for Future Work
References
Index
EULA