This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.
It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Author(s): Huiliang Cao
Publisher: Springer
Year: 2023
Language: English
Pages: 230
City: Singapore
Preface
Contents
1 Introduction
1.1 Silicon Based MEMS Gyroscope and Its Development
1.1.1 Silicon Based MEMS Gyroscope Advantages
1.1.2 Silicon-Based MEMS Gyroscope Classification
1.2 Silicon Based MEMS Gyroscope Development
1.2.1 Overview of Silicon Based MEMS Gyroscope Abroad
1.2.2 Overview of Silicon Based MEMS Gyroscope in China
1.3 Silicon Based MEMS Gyroscope Design Process
2 Silicon Based MEMS Gyroscope Structure and Working Principle
2.1 Chapter Introduction
2.2 Silicon Based MEMS Gyroscope Mechanics Principle
2.2.1 Coriolis Acceleration
2.2.2 Silicon Based MEMS Gyroscope Dynamic Equation
2.3 Silicon Based MEMS Gyroscope Motion Equation
2.4 Comb Electrostatic Drive and Detection Principle
2.4.1 Plate Capacitor Electrostatic Force Generation Principle
2.4.2 Comb Capacitance Detection Principle
2.4.3 Comb Capacitor Electrostatic Driving Principle
2.5 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structural Design
2.5.1 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure Analysis
2.5.2 Structural Modal Analysis
2.5.3 Static Stress Simulation Under Gravity
2.5.4 Stress at Maximum Displacement
2.5.5 Impact Simulation
2.5.6 Thermal Stress Simulation
2.5.7 Harmonic Response Analysis
2.6 Silicon Based MEMS Gyroscope Structure Processing
2.7 Chapter Summary
3 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure Noise Analysis and System Model
3.1 Chapter Introduction
3.2 Silicon Based MEMS Gyroscope Structure Equivalent Electrical Model and Interface
3.2.1 Silicon Based MEMS Gyroscope Structure Equivalent Electrical Model
3.2.2 Ring Diode Interface Circuit Noise Resisting Characteristic
3.2.3 Ring Diode Interface Circuit Working Principle
3.3 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure System Model
3.4 Silicon Based MEMS Gyroscope Structure Drive Technology
3.4.1 Silicon Based MEMS Gyroscope Self-Excited Drive Closed-Loop Scheme
3.4.2 Silicon Based MEMS Gyroscope Drive Loop Working Point Analysis
3.4.3 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Drive Loop System Simulation
3.4.4 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Drive Loop Test
3.5 Silicon Based MEMS Gyroscope Structural Noise
3.5.1 Structural Noise Analysis
3.5.2 Structural Noise Test
3.6 Chapter Summary
4 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Quadrature Error Correction Technology and Optimization
4.1 Chapter Introduction
4.2 Structural Error
4.2.1 Quadrature Error in Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
4.2.2 Asymmetrical Damping
4.3 Components of the Gyroscope Output Signal
4.3.1 Coriolis Force Signal
4.3.2 Mechanical Coupling Signal
4.3.3 Electrically Coupled Signals
4.3.4 Force Coupled Signal
4.3.5 Silicon Based MEMS Gyroscope Output Signal
4.3.6 Influence of Quadrature Error on Gyroscope Output Signals
4.4 Quadrature Error Correction
4.4.1 System Model with Coupling Stiffness and Damping
4.4.2 Charge Injection Method
4.4.3 Quadrature Force Correction Method
4.4.4 Quadrature Coupling Stiffness Correction Method
4.5 Optimization of Quadrature Correction Method for Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
4.5.1 Dual-Mass Quadrature Error Together Correction
4.5.2 Dual-Mass Quadrature Error Separate Correction
4.6 Quadrature Nulling Experiment
4.6.1 Room Temperature Bias Experiment
4.6.2 Full Temperature Bias Experiment
4.7 Chapter Summary
5 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Closed Loop and Frequency Tuning Technology
5.1 Chapter Introduction
5.2 Sensing Mode Force Rebalancing Combs Stimulation Method
5.2.1 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Mode Force Rebalancing Combs
5.2.2 Sensing Mode Force Rebalancing Combs Stimulation Method
5.3 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Mode Model
5.3.1 Dual-Mass Silicon Based MEMS Gyroscope Sensing In-phase and Anti-phase Modes Superposition Principle
5.3.2 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Mode Model Establishment and Verification
5.4 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Mode Open Loop
5.4.1 Sensing Mode Open Loop System Working Principle
5.4.2 Sensing Mode Open Loop System Bandwidth
5.4.3 Sensing Mode Open Loop System Simulation
5.5 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Mode Closed Loop
5.5.1 Sensing Mode Closed Loop System Working Principle
5.5.2 Sensing Mode Closed Loop System Bandwidth
5.6 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sensing Mode Closed-Loop Controller Design
5.6.1 Sensing Mode Closed Loop Controller Design Based on Pole-Zero Compensation Method
5.6.2 Sensing Mode Closed Loop Controller Design Based on Proportional Integral Phase Lead Controlling Method
5.7 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Frequency Tuning Technology Research and Simulation
5.7.1 Frequency Tuning Principle Based on Driving Displacement Phase Information
5.7.2 Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Frequency Tuning Model
5.7.3 Bandwidth Expansion Under Frequency Tuning Condition
5.8 Chapter Summary
6 Temperature Influence on Silicon-Based MEMS Gyroscope and Suppression Method
6.1 Chapter Introduction
6.2 Temperature Influence on Silicon-Based MEMS Gyroscope and Suppression Method
6.2.1 Temperature Influence on Modal Stiffness Coefficient
6.2.2 Temperature Influence on Modal Damping Coefficient
6.2.3 Effect of Temperature on Zero Bias
6.2.4 Temperature Influence on Scale Factor
6.3 Silicon Based MEMS Gyroscope Temperature Controlling Technology
6.3.1 Chip-Level Temperature Controlling Technology [157, 158]
6.3.2 Sensor—Level Temperature Controlling Technology [162–164]
6.4 Silicon Based MEMS Gyroscope Temperature Compensation Technology
6.4.1 Temperature Compensation Technology Based on Temperature Sensor
6.4.2 Temperature Compensation Technology Based on Silicon-Based MEMS Gyroscope Natural Frequency Information
6.5 Chapter Summary
7 Dual-Mass Linear Vibration Silicon Based MEMS Gyroscope Monitoring Circuit Design and Test Technology
7.1 Chapter Introduction
7.2 Dual-Mass Linear Vibration Silicon Based MEMS Gyroscope Monitoring Circuit Design
7.3 Key Performance Test
7.3.1 Scaling Factor Correlation Index Test
7.3.2 Bias Correlation Performance Test
7.4 Overall Performance Index Summary
7.5 Chapter Summary
References
