微惯性仪表

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微机械加速度计是以IC工艺和微机械加工工艺为基础制作的MEMS器件,在军民两用领域均有广泛的应用前景。本书以作者参加“九五”、“十五”重点预研课题及清华大学“985”校级重点项目工作为基础写成。全书共分9章,主要内容包括:微机械加速度计的类型、工作原理及数学模型,电容式微机械加速度计的结构和电路,微机械加速度计的集成、误差分析、主要性能指标及测试方法,微机械加速度计的应用及进一步研究动向等。

Author(s): 董景新
Publisher: 清华大学出版社
Year: 2003

Language: Chinese
Pages: 320